Chemical-mechanical planarization machine and method for uniformly planarizing semiconductor wafers.

Chemical-mechanical planarization machine and method for uniformly planarizing semiconductor wafers

Номер патента: US5868896A
Опубликовано: 09-02-1999
Автор(ы): Chris Chang Yu, Karl M. Robinson
Принадлежит: Micron Technology Inc
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Рисунок 1. Взаимосвязь патентов (ближайшие 20).

Chemical-mechanical planarization machine and method for uniformly planarizing semiconductor wafers

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