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Peeling method and manufacturing method of flexible device

Номер патента: US20220216243A1
Опубликовано: 07-07-2022
Автор(ы): Daisuke Kubota, Hiroki Adachi, Kenichi Okazaki, Satoru Idojiri, Shunpei Yamazaki, Yasuharu Hosaka
Принадлежит: Semiconductor Energy Laboratory Co Ltd
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