Lithographic apparatus and method for optimizing an illumination source using photolithographic simulations .

Lithographic apparatus and method for optimizing an illumination source using photolithographic simulations

Номер патента: EP1473596A2
Опубликовано: 03-11-2004
Автор(ы): Steven George Hansen
Принадлежит: ASML Netherlands BV
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Рисунок 1. Взаимосвязь патентов (ближайшие 20).

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Laser annealing apparatus and laser annealing method for substrate

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Method for improving the illumination of an illumination region from an illumination device

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Diagnosis method and method and apparatus for optimizing the contact pressure security in a continuously variable transmission

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Systems and methods for adaptive energy storage in an illumination system

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Systems and methods for adaptive energy storage in an illumination system

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Braking Control Apparatus and Braking Control Method For Electric Vehicle

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Apparatus and an accompanying method for use in a long-haul echo control device for detecting changes in path length and compensating the performance of an echo canceller therein

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Mobile terminal testing apparatus and cell use method for use in the same

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Image acquiring apparatus and image acquiring method for detecting and recognizing size of scan target without using sensors

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Mobile terminal testing apparatus and cell use method for use in the same

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Apparatus, and an associated method, for compensating for variable delay of packet data in a packet data communication system

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Electrode plate supporting device, laser cutting apparatus, and laser cutting method for electrode plate

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Apparatus, and an associated method, for compensating for variable delay of packet data in a packet data communication system

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Apparatus, and an associated method, for communicating text data in a radio communication system

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Apparatus, and an associated method, for communicating text data in a radio communication system

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Apparatus, and an associated method, for communicating text data in a radio communication system

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Drive control apparatus and drive control method for vibration wave driving apparatus

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Driving apparatus and a driving method for a single phase motor

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Refrigeration cycle apparatus and leakage inspection method for refrigerant piping of refrigeration cycle apparatus

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Interference mitigation apparatus and interference mitigation method for home network transmission line, and communication system using same

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Picture decoding apparatus and picture decoding method for decoding a current picture in direct mode

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Radio communication system, radio communication apparatus, and radio communication method for radio communication system

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Communication system, terminating apparatus, and pon virtualization method for use therein

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Apparatuses and wireless communication methods for group of sessions

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ADSL modem apparatus and re-initialization method for ADSL modem apparatus

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System and method for controlling multiple processes in a welding-type power source using a refined controller architecture

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Parking assist apparatus and parking assist method for vehicle

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Image recording apparatus and image recording method for the image recording apparatus image

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Vacuum degassing apparatus and vacuum degassing method for molten glass

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Transmission apparatus, reception apparatus, and transmission/reception method for OFDM-based broadcasting system

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Braking apparatus and braking control method for vehicle

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Braking apparatus and braking control method for vehicle

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Automatically controlled cleaning apparatus and controlled cleaning method for MEMS chip

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Surface processing apparatus and surface processing method for sic substrate

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Apparatus, and an associated method, for routing data through logical layers of a communication device

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Noncontacting electric power transfer apparatus, noncontacting signal transfer apparatus, split-type mechanical apparatus employing these transfer apparatus, and a control method for controlling same

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Apparatus, and an associated method, for performing link layer paging of a mobile station operable in a radio communication system

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Image forming apparatus and gradation correction method for the same

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Flexible dot matrix bonding apparatus and adaptive clamping method for disk-type planar component

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Apparatus, and an associated method, for providing wlan service in a fixed wireless access communication system

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Hydrogen supply apparatus and hydrogen supply method for measuring fuel consumption of hydrogen fuel vehicle

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Flexible dot matrix bonding apparatus and adaptive clamping method for disk-type planar component

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Apparatus, and an associated method, for providing wlan service in a fixed wireless access communication system

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Power feeding apparatus and power feeding method for submerged pump

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Apparatuses and wireless communication methods for data transfer

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Apparatus and the associated methods for calibrating a wavefront sensor

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Power feeding apparatus and power feeding method for submersible pump

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Image reading apparatus and a control method for an image reading apparatus

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Apparatus and an associated method, for paging a mobile station operable in a radio communication system

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Clothes treating apparatus and the control method for the same

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Inkjet assembly, inkjet printing apparatus and inkjet printing method for use in preparation of display component

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Inkjet assembly, inkjet printing apparatus and inkjet printing method for use in preparation of display component

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Inkjet assembly, inkjet printing apparatus and inkjet printing method for use in preparation of display component

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Apparatus, and an associated method, for facilitating synchronization in a wireless mesh network

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Novel topology selection and broadcast method for rule-based link state routing

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Apparatus and methods for optimizing intra cardiac filling pressures, heart rate, and cardiac output

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Apparatus and methods for optimizing intra cardiac filling pressures, heart rate, and cardiac output

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Blender for mixing or comminuting foodstuffs and method for operating a blender

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Systems and methods of using neural objective functions for closed-loop optimization

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Scientific system and method for optimizing television advertising

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System and Method for Sensor-Based Feedback Control of a Seed Conditioning and Production Process

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Systems and methods for optimizing message notification based on geographic location and time

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Illumination source activation based on temperature sensing

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System and method for optimized shelf product shipping, storage, and display onsite

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System and method for optimizing synchronization

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Appratus and method for filtrating oil-containing drainage water, and method and apparatus for restoring filtration membrane device

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Quenching apparatus and quenching method for metal sheet, and method for manufacturing steel sheet

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Apparatus, system and method for shaping a valve orifice

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Apparatus and method for marking objects on different faces

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Electrical apparatus and methods for an eye

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Apparatus and method for processing foodstuffs with liquid

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Material vehicle, traction apparatus and system, and method for controlling bidirectional traveling of material vehicle

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Apparatus and method for processing foodstuffs with liquid

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Apparatus and method for processing foodstuffs with liquid

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Material vehicle, traction apparatus and system, and method for controlling bidirectional traveling of material vehicle

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Rail having an identification marker, and apparatus and method for identifying the rail

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Vaporization apparatus and method for controlling the same

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Vaporization apparatus and method for controlling the same

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Apparatus and method for processing electronic components

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Control apparatus and control method for variable valve mechanism

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Apparatus and methods for optimizing volume status and cardiac output

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Knob element and slide element of an adjusting apparatus and adjusting apparatus and method for adjusting a position of a thermal tripping shaft

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Apparatus and method for transmitting and receiving signal in multimedia system

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Apparatus and method for transmitting and receiving signal in multimedia system

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Apparatus and method for transmitting and receiving signal in multimedia system

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Apparatus and method for transmitting and receiving signal in multimedia system

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Apparatus and method for transmitting and receiving signal in multimedia system

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Apparatus and method for forming and quickly wrapping a bale in a bale forming chamber

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Meta data information providing server, client apparatus, method of providing meta data information, and method of providing content

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Device and method for separating value documents, and value document processing system

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Fiber laser apparatus, image display apparatus and method of exciting up-conversion fiber laser apparatus

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Apparatus, system and method for identifying subintimal path of a flexible elongated device

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Apparatus, and associated method, for providing inner-cell registration of access terminal in a radio communication system

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Wireles gateway, and associated method, for a packet radio communication system

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Wireless gateway, and associated method, for a packet radio communication system

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Information processing apparatus and information processing method for creating workflow

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Detecting apparatus and detecting method for physiological information

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Apparatus, and associated method, for facilitating closed-loop power control in a communication system utilizing a multiple transmit antenna configuration

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Apparatus and associated method for operating upon data signals received at a receiving station of a fixed wireless access communication system

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Protection apparatus and protection method for photovoltaic power generation system and photovoltaic power generation system

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Apparatus, and associated method, for generating assignment information used pursuant to channel allocation in a radio communication system

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Apparatus, and associated method, for estimating frequency offset of a data symbol communicated in a communication system

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Apparatus, and associated method, for estimating frequency offset of a data symbol communicated in a communication system

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Apparatus, and associated method, for estimating frequency offset of a data symbol communicated in a communication system

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Apparatus, and associated method, for configuring a page message used to page an access terminal in a radio communication system pursuant to a partial identity comparison scheme

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Apparatus, and associated method, for facilitating communication connection between a mobile station and a communication network

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Apparatus, and associated method, for identifying radio network service availability

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Apparatus, and associated method, for estimating channel conditions of a communication channel of a communication system

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Light-emitting device, display apparatus, and manufacturing method for display apparatus

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Apparatus, and associated method, for communication system utilizing space-generated multilevel coding

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Communication apparatus and communication method for multi-generation random access

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Apparatus, and associated method, for communication system utilizing space-generated multilevel coding

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Apparatus, and associated method, for dynamically configuring a page message used to page an access terminal in a radio communication system

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Clothing processing apparatus and control method therefor

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Control apparatus and control method for sunroof of vehicle, and vehicle

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Press forming apparatus and press forming method for a semi-solid metal material

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Image capturing apparatus and pixel scanning method for image generation

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Liquid ejection head, liquid ejection apparatus and manufacturing method for liquid ejection head

Номер патента: US09975346B2. Автор: Yasuyuki Takanaka,Hiromasa Amma,Genji Inada,Masaya Uetsuki,Mikiya Umeyama,Takuya Iwano. Владелец: Canon Inc. Дата публикации: 2018-05-22.

X-ray imaging apparatus and control method for the same

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Electrostatic spraying apparatus, and current control method for electrostatic spraying apparatus

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Video encoding apparatus, video decoding apparatus, and video decoding method for performing intra-prediction based on directionality of neighboring block

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Control apparatus and control method for DC/DC converter capable of bidirectional power transfer

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PCRF apparatus and traffic handling method for use in PCRF

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Thermal processing apparatus and thermal processing method for heating substrate by light irradiation

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Apparatus, and associated method, for notifying, delivering, and deleting media bursts communicated in a push-to-talk over cellular communication system

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Printing apparatus and driving control method for printhead

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Image processing apparatus and image processing method for the collective transfer of prediction parameters between storage units

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Power adaptation apparatus and power adaptation method for controlling uplink/downlink power

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Water-blocking apparatus and water-blocking method for cooling water for hot-rolled steel sheet

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Video encoding apparatus, video decoding apparatus, and video decoding method for performing intra-prediction based on directionality of neighboring block

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Image processing apparatus and image processing method for efficiently reserving memory

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Communication control apparatus and communication control method for assigning resources for relay of data traffic

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Charging control apparatus and charging control method for secondary battery

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Cooling apparatus and cooling control method for EGR gas and engine oil

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Video encoding apparatus, video decoding apparatus, and video decoding method for performing intra-prediction based on directionality of neighboring block

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Image capturing apparatus, image processing apparatus, and image processing method for generating auxiliary information for captured image

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Gas injection systems for optimizing nanobubble formation in a disinfecting solution

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Systems and methods for adaptive energy storage in an illumination system

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Gas injection systems for optimizing nanobubble formation in a disinfecting solution

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Gas injection systems for optimizing nanobubble formation in a disinfecting solution

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Systems and methods for adaptive energy storage in an illumination system

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Apparatus And A Method For The Application Of Resin Along One Or More Crease Lines

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Communication apparatus and communication method for enhanced sensing by proxy

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Communication apparatus and communication method for enhanced sensing by proxy

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Apparatus, and associated method, for selectably controlling packet data flow in a packet radio communication system

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Apparatus, and associated method, for stabilizing a video sequence

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Film image reproducing apparatus and a control method for controlling reproduction of film image

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Apparatus, and associated method, for decoding convolutionally encoded data

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Apparatus, and associated method, for allocating channels in a radio communication system

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Multistage drying apparatus and multistage drying method for sheet material to be treated

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Communication apparatus and communication method for multi-layer transmission

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Transfer material, printed material, and manufacturing method for printed material

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Refining apparatus and refining method for recycling waste plastics

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Power supply apparatus and error detecting method for power supply apparatus

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Semiconductor integrated circuit apparatus and manufacturing method for same

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Information processing system, information processing apparatus, and information processing method for specifying application associated with function of device

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Information processing apparatus and information processing method for presentation of information based on status of user device

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Multiple organic rankine cycle systems and methods

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Multiple organic rankine cycle systems and methods

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Substrate treating apparatus and substrate treatment method for discharging treatment solution from nozzle to substrate

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Substrate processing apparatus and substrate processing method for performing cleaning treatment on substrate

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Image pickup apparatus and image pickup method for preventing degradation of image quality

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Substrate processing apparatus and substrate processing method for performing cleaning process and the like on substrate

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Image recording apparatus, and method and program for optimizing defective-recording-element compensation parameter

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Hydraulic control apparatus and hydraulic control method for automatic transmission

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Hydraulic control apparatus and hydraulic control method for automatic transmission

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Hydraulic control apparatus and hydraulic control method for automatic transmission

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Base station apparatus, mobile terminal apparatus and communication control method

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Laser apparatus and power adjustment method for optical network terminal

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Liquid ejecting apparatus and liquid supply method for liquid ejecting apparatus

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Apparatus, and associated method, for setting the number of page indications per page to be included in a quick page message

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Apparatus, and associated method, for setting the number of page indications per page to be included in a quick page message

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Wireless communication apparatus and wireless communication method for detecting electric field intensity of wirelss channel

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Imaging apparatus and imaging method

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Imaging Apparatus And Imaging Method

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Method for establishing a priority call in a fixed wireless access communication system

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Apparatus, and associated method, for selecting whether to reject as invalid a data segment received at a communication station

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Hydraulic control apparatus and hydraulic control method for automatic transmission

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Communication apparatus and communication method

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Apparatus, and associated method, for selecting antenna pattern configuration to be exhibited by an antenna assembly of a communication station

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Apparatus and associated method, for facilitating location determination of a mobile station pursuant to a location based application

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Communication management apparatus and communication management method for vehicle network

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Sheet material cutting apparatus, and associated method

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Image processing apparatus, image pickup apparatus, and image processing method for aberration correction

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Liquid ejection head, recording apparatus and heat radiation method for liquid ejection head

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Drawing apparatus and drawing control method for drawing apparatus

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Printing apparatus and ink heating method for printing apparatus

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Image recording apparatus and image recording method for rapid mirroring restoration

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Image-processing apparatus and image-processing method for generating a virtual angle of view

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Appratus and method for filtrating oil-containing drainage water, and method and apparatus for restoring filtration membrane device

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Gas removal apparatus and gas removal method for secondary battery

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Parking assist apparatus and parking assist method for vehicle

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Flaw detection apparatus and method for tubes

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Data exchange apparatus and data exchange method for vehicle, apparatus and method for vehicle parts of vehicle and computer program

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Arrangement in a wave energy recovery apparatus and method for operating a wave energy recovery apparatus

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Frame mapping apparatus and method

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Apparatus and method for automated wafer carrier handling

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Appratus and method for detecting heart murmurs

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Ultrasonic diagnostic device and method for controlling ultrasonic diagnostic device

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Cleaning apparatus for semiconductor wafer and method of cleaning semiconductor wafer

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Apparatus and method for excavating a tunnel

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Apparatus and method for unwinding reels and for joining a ply between two reels

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Molding roller, apparatus and method for manufacturing same

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Frame de-mapping apparatus and method

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Apparatus and and method for growing discrete ultralong cylindrical sp2 carbon structures

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Panoramic imaging apparatus and image processing method for panoramic imaging

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Prefilled, disposable device for introducing a pharmacologically active substance into a body cavity of a patient, method for manufacturing said device and mould apparatus for making said device

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Apparatus, and associated method, for facilitating radio control system operation with an ics-capable wireless device

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Facsimile apparatus and facsimile transmission method for digital communication network

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CVD apparatus and CVD method

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Take-up reel, veneer reeling apparatus, tape feeding unit for veneer roll, and veneer roll unwinding apparatus and a production method for laminated wood

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Lettering apparatus and lettering method for beer barrel

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Image processing apparatus and image processing method for generating a color separation table used in converting an image signal for the amount of a colorant

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