Thermal arched beam microelectromechanical devices and associated fabrication methods

12-04-1999 дата публикации

Номер:

AU9212798A

Автор: Ramaswamy Mahadevan, Robert L. Wood, Vijayakumar R Dhuler

Принадлежит: MCNC

Контакты:

Номер заявки:

Дата заявки:

CPC - классификация

B B8 B81 B81B B81B2 B81B22 B81B220 B81B2201 B81B2201/B81B2201/0 B81B2201/03 B81B2201/031 B81B2201/05 B81B2201/054 B81B2203 B81B2203/B81B2203/0 B81B2203/01 B81B2203/010 B81B2203/0109 B81B2203/05 B81B2203/051 B81B3 B81B3/B81B3/0 B81B3/00 B81B3/002 B81B3/0024 B81B3/005 B81B3/0054 F F0 F03 F03G F03G7 F03G7/F03G7/0 F03G7/06 F1 F15 F15C F15C5 F15C5/F15C5/0 F15C5/00 F16 F16K F16K2 F16K20 F16K209 F16K2099 F16K2099/F16K2099/0 F16K2099/00 F16K2099/007 F16K2099/0071 F16K2099/0074 F16K2099/008 F16K9 F16K99 F16K99/F16K99/0 F16K99/00 F16K99/000 F16K99/0001 F16K99/001 F16K99/0011 F16K99/003 F16K99/0034 F16K99/004 F16K99/0044 G G0 G02 G02B G02B6 G02B6/G02B6/3 G02B6/38 G02B6/380 G02B6/3803 G02B6/4 G02B6/42 G02B6/422 G02B6/4226 H H0 H01 H01H H01H1 H01H1/H01H1/0 H01H1/00 H01H1/003 H01H1/0036 H01H2 H01H20 H01H200 H01H2001 H01H2001/H01H2001/0 H01H2001/00 H01H2001/004 H01H2001/0042 H01H2001/0047 H01H2001/006 H01H2001/0068 H01H206 H01H2061 H01H2061/H01H2061/0 H01H2061/00 H01H2061/006 H01H6 H01H61 H01H61/H01H61/0 H01H61/00 H01H61/02 H01H67 H01H67/H01H67/2 H01H67/26 H01H9 H01H9/H01H9/1 H01H9/14 Y Y1 Y10 Y10T Y10T2 Y10T29 Y10T29/Y10T29/4 Y10T29/49 Y10T29/491 Y10T29/4910 Y10T29/49105

IPC - классификация

F F1 F15 F15C F15C5 F15C5/F15C5/0 F15C5/00 F16 F16K F16K9 F16K99 F16K99/F16K99/0 F16K99/00 F16K99/000 F16K99/0001 H H0 H01 H01H H01H6 H01H67 H01H67/H01H67/2 H01H67/26