Selektive Ätzung von TiW für C4-Herstellung

29-07-1999 дата публикации

Номер:

DE0069506948T2

Автор: DATTA MADHAV, SHENOY RAVINDRA VAMAN, DATTA, MADHAV, YORKTOWN HEIGHTS, NEW YORK 10598, US, SHENOY, RAVINDRA VAMAN, FEEKSKILL, NEW YORK 10566, US

Принадлежит: IBM, INTERNATIONAL BUSINESS MACHINES CORP., ARMONK, N.Y., US

Контакты:

Номер заявки: 48-69-6950

Дата заявки: 17-05-1995

CPC - классификация

C C2 C23 C23F C23F1 C23F1/C23F1/2 C23F1/26 C23F1/4 C23F1/44 H H0 H01 H01L H01L2 H01L22 H01L222 H01L2224 H01L2224/H01L2224/1 H01L2224/13 H01L2224/130 H01L2224/1309 H01L2224/13099 H01L2224/131 H01L2224/1311 H01L2224/13116 H01L24 H01L24/H01L24/0 H01L24/03 H01L24/05 H01L24/1 H01L24/11 H01L24/13 H01L29 H01L292 H01L2924 H01L2924/H01L2924/0 H01L2924/00 H01L2924/000 H01L2924/0001 H01L2924/01 H01L2924/010 H01L2924/0100 H01L2924/01004 H01L2924/01005 H01L2924/01006 H01L2924/0101 H01L2924/01011 H01L2924/01013 H01L2924/01019 H01L2924/0102 H01L2924/01022 H01L2924/01024 H01L2924/01029 H01L2924/0103 H01L2924/01033 H01L2924/0107 H01L2924/01074 H01L2924/01078 H01L2924/01079 H01L2924/0108 H01L2924/01082 H01L2924/013 H01L2924/0132 H01L2924/01327 H01L2924/014 H01L2924/1 H01L2924/14 H01L2924/19 H01L2924/190 H01L2924/1904 H01L2924/19043

IPC - классификация

C C2 C23 C23F C23F1 C23F1/C23F1/2 C23F1/26 C23F1/4 C23F1/44 H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/2 H01L21/28 H01L21/3 H01L21/30 H01L21/306 H01L21/32 H01L21/321 H01L21/3213 H01L21/6 H01L21/60 H01L23 H01L23/H01L23/4 H01L23/48 H01L23/485