PROCESS FOR PRODUCING STRUCTURAL BODY AND ETCHANT FOR SILICON OXIDE FILM

28-07-2005 дата публикации

Номер:

SG0000112994A1

Автор: Saga Koichiro, Watanabe Hiroya, Azuma Tomoyuki

Принадлежит: Sony Corp, Mitsubishi Gas Chemical Co

Контакты:

Номер заявки: 54-07-20046

Дата заявки: 21-12-2004

CPC - классификация

B B8 B81 B81C B81C1 B81C1/B81C1/0 B81C1/00 B81C1/008 B81C1/0084 B81C1/00849 B81C2 B81C22 B81C220 B81C2201 B81C2201/B81C2201/1 B81C2201/11 B81C2201/117 H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/3 H01L21/30 H01L21/304 H01L21/306 H01L21/31

IPC - классификация

B B8 B81 B81B B81B3 B81B3/B81B3/0 B81B3/00 B81C B81C1 B81C1/B81C1/0 B81C1/00 C C0 C09 C09K C09K1 C09K13 C09K13/C09K13/0 C09K13/08 H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/3 H01L21/30 H01L21/304 H01L21/306 H01L21/308 H01L21/31 H01L29 H01L29/H01L29/8 H01L29/84