Gate-all-around semiconductor device and method of fabricating the same

26-04-2016 дата публикации

Номер:

US9324818B2

Автор: Clement Merckling, Nadine Collaert, Niamh Waldron

Принадлежит: Interuniversitair Microelektronica Centrum vzw IMEC

Контакты:

Номер заявки:

Дата заявки:

CPC - классификация

B B8 B82 B82Y B82Y1 B82Y10 B82Y10/B82Y10/0 B82Y10/00 B82Y4 B82Y40 B82Y40/B82Y40/0 B82Y40/00 H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/0 H01L21/02 H01L21/023 H01L21/0238 H01L21/02381 H01L21/025 H01L21/0253 H01L21/02538 H01L21/0257 H01L21/02579 H01L21/026 H01L21/0262 H01L21/0263 H01L21/02639 H01L27 H01L27/H01L27/0 H01L27/08 H01L27/088 H01L27/0886 H01L29 H01L29/H01L29/0 H01L29/04 H01L29/06 H01L29/064 H01L29/0649 H01L29/067 H01L29/0673 H01L29/0676 H01L29/1 H01L29/10 H01L29/107 H01L29/1079 H01L29/2 H01L29/20 H01L29/4 H01L29/40 H01L29/401 H01L29/41 H01L29/413 H01L29/42 H01L29/423 H01L29/4239 H01L29/42392 H01L29/6 H01L29/66 H01L29/664 H01L29/6646 H01L29/66469 H01L29/665 H01L29/6654 H01L29/66545 H01L29/668 H01L29/6681 H01L29/7 H01L29/77 H01L29/775 H01L29/78 H01L29/785 H01L29/7853 H01L29/786 H01L29/7868 H01L29/78681 H01L29/7869 H01L29/78696

IPC - классификация

B B8 B82 B82Y B82Y2 B82Y25 B82Y25/B82Y25/0 B82Y25/00 G G0 G03 G03F G03F1 G03F1/G03F1/2 G03F1/24 H H0 H01 H01L H01L2 H01L29 H01L29/H01L29/7 H01L29/77 H01L29/775

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