Metal gate structure

12-05-2020 дата публикации

Номер:

US10651283B2

Автор: Da-Yuan Lee, Kuang-Yuan Hsu, Peng-Soon Lim

Принадлежит: Taiwan Semiconductor Manufacturing Co TSMC Ltd

Контакты:

Номер заявки:

Дата заявки:

CPC - классификация

H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/2 H01L21/28 H01L21/281 H01L21/2811 H01L21/28114 H01L21/282 H01L21/2824 H01L21/28247 H01L21/285 H01L21/2855 H01L21/3 H01L21/31 H01L21/311 H01L21/3110 H01L21/31105 H01L21/8 H01L21/82 H01L21/823 H01L21/8234 H01L21/82345 H01L21/823456 H01L29 H01L29/H01L29/4 H01L29/42 H01L29/423 H01L29/4236 H01L29/4237 H01L29/42376 H01L29/49 H01L29/496 H01L29/4966 H01L29/5 H01L29/51 H01L29/513 H01L29/517

IPC - классификация

H H0 H01 H01L H01L2 H01L29 H01L29/H01L29/4 H01L29/40 H01L29/401 H01L29/4011 H01L29/40114 H01L29/49 H01L29/490 H01L29/4908 H01L29/5 H01L29/51 H01L29/513

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