Polyimide/silicon oxide bi-layer for bond pad parasitic capacitance control in semiconductor electro-optical device

02-04-2002 дата публикации

Номер:

US6365968B1

Автор: Hanh Lu, Richard Sahara, Yi Qian

Принадлежит: Corning Lasertron Inc

Контакты:

Номер заявки:

Дата заявки:

CPC - классификация

G G0 G03 G03F G03F7 G03F7/G03F7/0 G03F7/00 G03F7/003 G03F7/0035 H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/3 H01L21/32 H01L21/320 H01L21/3205 H01L22 H01L222 H01L2224 H01L2224/H01L2224/0 H01L2224/05 H01L2224/056 H01L2224/0564 H01L2224/05644 H01L2224/8 H01L2224/85 H01L2224/852 H01L2224/8520 H01L2224/85205 H01L29 H01L292 H01L2924 H01L2924/H01L2924/0 H01L2924/01 H01L2924/010 H01L2924/0107 H01L2924/01078 H01L2924/01079 H01S H01S2 H01S23 H01S230 H01S2301 H01S2301/H01S2301/1 H01S2301/17 H01S2301/176 H01S5 H01S5/H01S5/0 H01S5/04 H01S5/042 H01S5/0425 H01S5/04254 H01S5/04257 H01S5/2 H01S5/22 H01S5/220 H01S5/2205 H01S5/227 H01S5/2275

IPC - классификация

H H0 H01 H01S H01S5 H01S5/H01S5/0 H01S5/02 H01S5/028 H01S5/2 H01S5/20 H01S5/22

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