Compliant silicon substrates for heteroepitaxial growth by hydrogen-induced exfoliation

17-03-2022 дата публикации

Номер:

WO2022055794A1

Автор: James Pattison

Принадлежит: Raytheon Company

Контакты:

Номер заявки:

Дата заявки:

CPC - классификация

H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/0 H01L21/02 H01L21/023 H01L21/0238 H01L21/02381 H01L21/024 H01L21/0245 H01L21/025 H01L21/0254 H01L21/02543 H01L21/02546 H01L21/02549 H01L21/0256 H01L21/02562 H01L21/026 H01L21/0265 H01L21/02658 H01L21/0269 H01L21/02694 H01L21/04 H01L21/041 H01L21/0415 H01L21/2 H01L21/20 H01L21/201 H01L21/2015 H01L3 H01L31 H01L31/H01L31/0 H01L31/02 H01L31/029 H01L31/0296 H01L31/02966 H01L31/03 H01L31/030 H01L31/0304 H01L31/03046 H01L31/035 H01L31/0352 H01L31/03523 H01L31/035236 H01L31/1 H01L31/18 H01L31/183 H01L31/1832 H01L31/1836 H01L31/184 H01L31/1844 H01L31/185 H01L31/1852

IPC - классификация

C C3 C30 C30B C30B2 C30B29 C30B29/C30B29/4 C30B29/40 C30B29/403 H H0 H01 H01L H01L3 H01L31 H01L31/H01L31/0 H01L31/02 H01L31/029 H01L31/0296 H01L31/02966 H01L31/03 H01L31/030 H01L31/0304 H01L31/03046

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