Probe head having a membrane suspended probe
Номер патента: EP1766426A2
Опубликовано: 28-03-2007
Автор(ы): Kenneth Smith, Michael Jolley, Victoria Van Syckel
Принадлежит: CASCADE MICROTECH INC
Опубликовано: 28-03-2007
Автор(ы): Kenneth Smith, Michael Jolley, Victoria Van Syckel
Принадлежит: CASCADE MICROTECH INC
Реферат: A probe head including an elastic membrane capable of exerting a restoring force when one of the surfaces of the elastic membrane is distorted. A conductive probe includes a beam having a first end and a second end, with a probe tip proximate the first end for contacting a device under test A beam contact proximate the second end of the beam. The beam being movable to deform at least one surface of the elastic membrane.
Probe head with machined mounting pads and method of forming same
Номер патента: EP1984748A1. Автор: Steven Wang,Salleh Ismail,Raffi Garabedian. Владелец: Touchdown Technologies Inc. Дата публикации: 2008-10-29.