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Support plate, exposure apparatus having the support plate, and a device manufacturing method using the exposure apparatus

Номер патента: US8045138B2
Опубликовано: 25-10-2011
Автор(ы): Makoto Ogusu
Принадлежит: Canon Inc
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Inspection apparatus for semiconductor device and manufacturing method for semiconductor using the inspection apparatus

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Stacked cell manufacturing method and apparatus using the same

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Method for Optimizing a Vacuum Cleaning Apparatus Having a Cylinder Vacuum Cleaner or Upright Vacuum Cleaner and a Filter Bag

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Ceramic core, manufacturing method for the same, manufacturing method for casting using the ceramic core, and casting manufactured by the method

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A body of a disc brake caliper, a method for cast manufacturing it and a core for said cast manufacturing method

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Method for manufacturing a drug delivery device and a drug delivery device manufactured according to the method

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Image reading apparatus having a partition module between an image sensor module and a heat source

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Display apparatus having a metal pattern layer disposed between a substrate and a pixel

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Absorbents having the capability of decomposing organic halogen compounds and a process for producing the same

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Wireless access point apparatus and a network traffic intrusion detection and prevention method using the same

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Ink composition for forming an electron transport layer of a light-emitting device and a light-emitting device manufactured using the ink composition

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Support for transporting containers in a microwave inspection device and a device and method of inspection of containers using the support

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Support for transporting containers in a microwave inspection device and a device and method of inspection of containers using the support

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Support for transporting containers in a microwave inspection device and a device and method of inspection of containers using the support

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Manufacturing method for a glass substrate having a phosphor layer used as a color cathode ray tube front panel and a color cathode ray tube manufacturing method

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Microorganism producing 4-hydroxybutyrate and a method for producing 4-hydroxybutyrate in anaerobic condition using the same

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Composition including a fluorinated polymer and a non-fluorinated polymer and methods of making and using the same

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Gait perturbation system and a method for testing and/or training a subject using the same

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Gait perturbation system and a method for testing and/or training a subject using the same

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Microorganism producing 4-hydroxybutyrate and a method for producing 4-hydroxybutyrate in anaerobic condition using the same

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Spinning nozzle, a process for preparing a fiber precursor of metal compound, and a process for preparing a fiber of metal compound using the same

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Display device having a light-blocking material in an insulating layer between a transistor and a light-emitting element and manufacturing method thereof

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Catheter assembly/package utilizing a hydrating/hydrogel sleeve and a foil outer layer and method of making and using the same

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Catheter assembly/package utilizing a hydrating/hydrogel sleeve and a foil outer layer and method of making and using the same

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Support for use in catalyst for producing lower aliphatic carboxylic acid ester, catalyst for producing lower aliphatic carboxylic acid ester using the support, process for producing the catalyst, and process for producing lower aliphatic carboxylic acid ester using the catalyst

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Pulley holder and a drive transmission mechanism and an image recording apparatus using the pulley holder

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Dual surfactant digester additive composition and a method for enhancing the pulping of wood chips using the same

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A microorganism of corynebacterium genus having enhanced l-arginine or l-citrulline productivity and a method for producing l-arginine or l-citrulline using the same

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Microorganism of corynebacterium genus having enhanced l-arginine or l-citrulline productivity and a method for producing l-arginine or l-citrulline using the same

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Microorganism of corynebacterium genus having enhanced l-arginine or l-citrulline productivity and a method for producing l-arginine or l-citrulline using the same

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Method for forming a timepiece train wheel support plate and a timepiece comprising a mold structure for forming a timepiece train wheel support plate and a timepiece train wheel support plate formed of the same

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Suspension assembly, magnetic head suspension assembly, and disk device having the same

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Display device and manufacturing method of display device

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Foldable support plate, flexible screen module and foldable electronic device

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The connection mechanism between a water service meter and a leakage-of-water judging machine, and the leakage-of-water judging machine using this connection mechanism

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Electronic Device, Screen Bearing Plate, and Flexible Screen Assembly

Номер патента: US20240373566A1. Автор: Bo Wu,Bo Huang,Weidong Yu,Weihua Mao,Xiaotao DAI,Jianqing SHENG. Владелец: Huawei Technologies Co Ltd. Дата публикации: 2024-11-07.

Support plate and display device

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Electronic device including support plate, and method for manufacturing the support plate

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Support plate and foldable display

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Supporting plate and display module

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A hinge comprising a movable support plate, and an electronic device with the hinge

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Support plate and display device

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Support plate of an electrowetting display

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Cashbox and money validator using the same

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Display device including support plate with opening

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Foldable support plate, flexible display module, and foldable electronic device

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Frame for display device and display device having the same

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Mirror unit and exposure apparatus

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Workpiece holder and method using same for detecting lateral displacement of workpiece

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Support plate for solid-state imaging element, method for manufacturing the same, and solid-state imaging device

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Disk reproducing apparatus having disk changing function

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Test socket and test apparatus having the same, manufacturing method for the test socket

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Optical plate and tiled display apparatus having the same

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Retraction device and feed mechanism having the same

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Reaction device for tiny organism and monitoring device for tiny organism using the same

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Electrical device for nail grinding and a removable joint head for such device

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Support Plate for Installing Tile

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Peeling method for peeling off substrate from support plate

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Support Plate for Installing Tile

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Electrode assembly and related battery, device, manufacturing method, and manufacturing device

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Substrate support plate, substrate processing apparatus including the same, and substrate processing method

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A rotor of a synchronous reluctance machine and a method for manufacturing the same

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A rotor of a synchronous reluctance machine and a method for manufacturing the same

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System for moving the plates and the parts of a hot runner mold for injection molding of plastic material, suitable for increasing the thermal efficiency of the mold, and corresponding hot runner mold with high thermal efficiency and method for increasing the thermal efficiency of a hot runner mold

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Deposition device for forming organic layer using joule-heating and device for fabricating electroluminescent display device using the deposition device

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Teaching method and substrate treating apparatus using the same

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Central support device for supporting plate-shaped object and storage apparatus for storing plate-shaped object

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Semiconductor device manufacturing method and design support apparatus

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Wafer supporting plate

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Support plate for receiving of sample particles in an orderly manner

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Insole support plate mechanism

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Modular pim analyzer and method using the same

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Jig for bite alignment in dentistry and bite registration method using the same

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Additive manufacturing method using a focused energy source, said method being regulated according to the intensity of a control current of said focused energy source

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Method for manufacturing graphene thermoelectric device and graphene thermoelectric device manufactured thereby

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Mine roof support plate bolt

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Method for manufacturing stretchable electrochromic device, and stretchable electrochromic device manufactured thereby

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Method of manufacturing flexible thin-film typer super-capacitor device using a hot-melt adhesive film, and super-capacitor device manufactured by the method

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Adhesive film for use in semiconductor device manufacture, manufacturing method of said adhesive film, semiconductor device, and manufacturing method of semiconductor device

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Rail is mounted on support plate above support structure, slide being positioned between the two, allowing support plate to move along length of rail

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Mechanical device for the arrangement and handling of an explosive cone adjustable to one arm, used in underground mining operations, comprises a grip system, an adjustment spring, a support plate, two thrust cylinders, a motor for rotation, a motor for tilt, a union support and a protective motor cover

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A support for a bouquet or floral arrangement and a method for preparing a bouquet or floral arrangement using the same

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A microchip manufacturing method and a microchip manufactured by the manufacturing method.

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Reclaiming mechanism and coil manufacturing method and device using the same

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Method for winding a metal strip in hot rolling and a method for producing a hot-rolled metal strip using the same

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A composition for a foamable refractory paint and a method for producing a foamable refractory coating film using the same.

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A sintering method for an oxide superconducting powder rod and a method for preparing a superconducting wire rod by using the powder rod sintered by using the sintering method

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A steel foundation material for buildings and a method for forming a concrete foundation for buildings using the steel foundation material.

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A mother color filter substrate and a method for manufacturing a liquid crystal panel manufactured using the mother color filter substrate.

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A method for detecting a gripping state of a pressure measuring sheet and a rail clamp device for a track-traveling machine using the pressure measuring sheet.

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METHOD FOR MEASURING THE PHYSICAL QUANTITY OF AN OBJECT USING A SINGLE LIGHT SOURCE AND A FLAT SURFACE SENSOR UNIT, AND VIRTUAL GOLF SYSTEM USING THE METHOD

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NANOSTRUCTURING PROCESS FOR INGOT SURFACE, WAFER MANUFACTURING METHOD, AND WAFER USING THE SAME

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Conductive paste composition, and manufacturing method of electrode using the composition

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Manufacturing method of speaker diaphragm, speaker diaphragm manufactured by the manufacturing method, and speaker using the speaker diaphragm

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Multilayer laminated net, manufacturing method and product using the same

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A device for cooling rocks when sinking mines using the freezing method

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Nonwoven laminated net, manufacturing method and product using the same

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Sheet folding device and manufacturing method of absorber using the same

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METAL MATERIAL FOR ELECTRONIC COMPONENT AND ITS MANUFACTURING METHOD, CONNECTOR TERMINAL USING THE SAME, CONNECTOR AND ELECTRONIC COMPONENT

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Reactor and continuous manufacturing method of alcohol using the same

Номер патента: JP2017171588A. Автор: Hiroaki Kodama,Tadashi Uchida,匡 打田,基樹 五家,Motoki Goka,大晃 児玉,敬司 城ノ口,Keiji Jonoguchi. Владелец: Mitsubishi Chemical Holdings Corp. Дата публикации: 2017-09-28.

Apparatus for regenerating and purifying washing water for an automatic processor and a method for processing a silver halide photosensitive material using the apparatus

Номер патента: JP2880328B2. Автор: 智美 川崎,友伸 守屋. Владелец: KONICA MINOLTA INC. Дата публикации: 1999-04-05.

Nonwoven laminated net, manufacturing method and product using the same

Номер патента: JP3430449B2. Автор: 英夫 磯田,靖司 山田,高治 西田. Владелец: Toyobo Co Ltd. Дата публикации: 2003-07-28.

Pressure detection unit, its manufacturing method, pressure sensor using the pressure detection unit, and its manufacturing method

Номер патента: JP7079485B2. Автор: 倫久 青山,元桐 向井. Владелец: Fujikoki Corp. Дата публикации: 2022-06-02.

Laminated net, manufacturing method and product using the same

Номер патента: JP3454374B2. Автор: 英夫 磯田,靖司 山田,高治 西田. Владелец: Toyobo Co Ltd. Дата публикации: 2003-10-06.

A method for producing disilver hydrogen citrate and / or silver dihydrogen citrate, and a method for producing an antibacterial or antiviral solution using the same.

Номер патента: JP6875763B1. Автор: 富久 佐々木,隆薫 佐々木,祥憲 佐々木. Владелец: SASAKI CHEMICAL INDUSTRY CO., LTD.. Дата публикации: 2021-05-26.

Cellulose derivative particle, its manufacturing method and cosmetic using the same

Номер патента: JP2003252903A. Автор: 博隆 伊原,昭二 永岡,誠 高藤,Masanori Nagata,Shinichiro Ishihara,Toshihiko Sakurai,晋一郎 石原,Hirotaka Ihara,Shoji Nagaoka,正典 永田,敏彦 櫻井,Makoto Takato,Yasunori Takiguchi,靖憲 滝口,Atsuko Tohata,温子 戸畑. Владелец: Libatape Pharmaceutical Co Ltd. Дата публикации: 2003-09-10.

Polymer fine particle, its manufacturing method and plastisol using the same

Номер патента: JP2007119651A. Автор: Toshihiro Kasai,Ayako Fujie,俊宏 笠井,綾子 藤江. Владелец: Mitsubishi Rayon Co Ltd. Дата публикации: 2007-05-17.

Rubbing method and apparatus, and optical film manufacturing method and apparatus using the same

Номер патента: JP4996273B2. Автор: 一弘 下田,真澄 坂本. Владелец: Fujifilm Corp. Дата публикации: 2012-08-08.

A micro sensor, its manufacturing method, and sensor using the same

Номер патента: TW200508590A. Автор: Gwo-Bin Lee,Jia-Yan Li. Владелец: Univ Nat Cheng Kung. Дата публикации: 2005-03-01.

A device for the generation of electrical power using the piezoelectric effect

Номер патента: GB9716753D0. Автор: . Владелец: COOPER ROBIN A. Дата публикации: 1997-10-15.

Support for use in catalyst for producing lower aliphatic carboxylic acid ester, catalyst for producing lower aliphatic carboxylic acid ester using the support, process for producing the catalyst, and process for producing lower aliphatic carboxylic acid ester using the catalyst.

Номер патента: ZA200305143B. Автор: Hiroshi Uchida,Etsuko Kadowaki,Kousuke Narumi. Владелец: Showa Denko KK. Дата публикации: 2004-03-12.

Support for use in catalyst for producing lower aliphatic carboxylic acid ester, catalyst for producing lower aliphatic carboxylic acid ester using the support, process for producing the catalyst, and process for producing lower aliphatic carboxylic acid ester using the catalyst

Номер патента: AU2002230220A1. Автор: Hiroshi Uchida,Etsuko Kadowaki,Kousuke Narumi. Владелец: Showa Denko KK. Дата публикации: 2002-08-28.

COORDINATE INPUT APPARATUS, LIGHT RECEIVING APPARATUS OF THE COORDINATE INPUT APPARATUS, AND MANUFACTURING METHOD OF THE SAME

Номер патента: US20120002217A1. Автор: Kobayashi Katsuyuki,Yoshimura Yuichiro. Владелец: CANON KABUSHIKI KAISHA. Дата публикации: 2012-01-05.

SOLID-STATE IMAGING DEVICE MANUFACTURING METHOD, SOLID-STATE IMAGING DEVICE, AND ELECTRONIC APPARATUS

Номер патента: US20120001290A1. Автор: Sawada Ken. Владелец: SONY CORPORATION. Дата публикации: 2012-01-05.

SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD

Номер патента: US20120001304A1. Автор: . Владелец: TOKYO ELECTRON LIMITED. Дата публикации: 2012-01-05.

INK FOR ORGANIC ELECTROLUMINESCENT DEVICE, MANUFACTURING METHOD OF ORGANIC ELECTROLUMINESCENT DEVICE, ORGANIC DISPLAY PANEL, ORGANIC DISPLAY APPARATUS, ORGANIC ELECTROLUMINESCENT APPARATUS, INK , FORMING METHOD OF FUNCTIONAL LAYER, AND ORGANIC ELECTROLUMINESCENT DEVICE

Номер патента: US20120001124A1. Автор: . Владелец: Panasonic Corporation. Дата публикации: 2012-01-05.

Semiconductor Device and Manufacturing Method Thereof

Номер патента: US20120001332A1. Автор: TANAKA Tetsuhiro. Владелец: . Дата публикации: 2012-01-05.

COMMUNICATION APPARATUS HAVING HUMAN BODY CONTACT SENSING FUNCTION AND METHOD THEREOF

Номер патента: US20120003929A1. Автор: . Владелец: Electronics and Telecommunications Research Institute. Дата публикации: 2012-01-05.

STAMPER, METHOD OF MANUFACTURING THE STAMPER, AND MAGNETIC RECORDING MEDIUM MANUFACTURING METHOD USING THE STAMPER

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SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF

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SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF

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JOINT BRACE AND A MOVEMENT RESTRAINING DEVICE THEREFOR

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OPTICAL FILM AND MANUFACTURING METHOD THEREFOR

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ANTI-REFLECTION DISPLAY WINDOW PANEL AND MANUFACTURING METHOD THEREOF

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PIEZORESISTIVE DEVICE, METHOD OF MANUFACTURING THE SAME AND PIEZORESISTIVE-TYPE TOUCH PANEL HAVING THE SAME

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ELECTROPHOTOGRAPHY PHOTORECEPTOR, METHOD OF MANUFACTURING THE SAME, AND ELECTROPHOTOGRAPHY DEVICE USING THE SAME

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ACTINIC-RAY- OR RADIATION-SENSITIVE RESIN COMPOSITION AND METHOD OF FORMING PATTERN USING THE COMPOSITION

Номер патента: US20120003585A1. Автор: TSUBAKI Hideaki,Tsuchimura Tomotaka,Yatsuo Tadateru,TSUCHIHASHI Toru,SHIRAKAWA Koji. Владелец: FUJIFILM Corporation. Дата публикации: 2012-01-05.

MANUFACTURING METHOD FOR SOLID-STATE IMAGING DEVICE

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SEMICONDUCTOR DEVICE MANUFACTURE METHOD AND SEMICONDUCTOR DEVICE

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COMMUNICATION APPARATUS, COMMUNICATION METHOD, AND A COMPUTER-READABLE MEDIUM

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IMAGE DATA TEST UNIT, IMAGE APPARATUS HAVING THE SAME, AND METHOD OF TESTING IMAGE DATA USING THE SAME

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MOBILE TERMINAL AND INFORMATION DISPLAY METHOD USING THE SAME

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HAND HELD ANALYSIS DEVICE FOR ANALYZING A BODY FLUID AND A CONTROL METHOD THEREFOR

Номер патента: US20120004852A1. Автор: . Владелец: . Дата публикации: 2012-01-05.

RADIATION IMAGE DETECTION APPARATUS AND MANUFACTURING METHOD OF RADIATION IMAGE DETECTOR

Номер патента: US20120001201A1. Автор: . Владелец: FUJIFILM Corporation. Дата публикации: 2012-01-05.

SUSTAINED RELEASE DRUG DELIVERY SYSTEMS COMPRISING A WATER SOLUBLE THERAPEUTIC AGENT AND A RELEASE MODIFIER

Номер патента: US20120003230A1. Автор: Trogden John T.,Lyons Robert T.. Владелец: . Дата публикации: 2012-01-05.

MANUFACTURING METHOD OF POWER STORAGE DEVICE

Номер патента: US20120003530A1. Автор: . Владелец: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.. Дата публикации: 2012-01-05.

METHOD FOR MANUFACTURING ULTRA SMALL PARTICLE, POSITIVE ELECTRODE ACTIVE MATERIAL OF SECOND BATTERY USING THE METHOD FOR MANUFACTURING ULTRA SMALL PARTICLE AND METHOD FOR MANUFACTURING THE SAME, AND SECONDARY BATTERY USING THE POSITIVE ELECTRODE ACTIVE MATERIAL AND METHOD FOR MANUFACTURING THE SAME

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MANUFACTURING METHOD AND MANUFACTURING APPARATUS FOR CATALYST-COATED MEMBRANE ASSEMBLY

Номер патента: US20120003572A1. Автор: . Владелец: . Дата публикации: 2012-01-05.

SEMICONDUCTOR LIGHT EMITTING DIODE AND MANUFACTURING METHOD THEREOF

Номер патента: US20120001152A1. Автор: Kim Young Sun,KIM Ki Sung,KIM Gi Bum,KIM Tae Hun,SHIN Young Chul. Владелец: . Дата публикации: 2012-01-05.

Switchable 3-Dimensional Conversion Device, Method for Manufacturing the Same and Stereoscopic Image Display Device Using the Same

Номер патента: US20120001890A1. Автор: Im Hee-Jin,Kim Chul-Ho,KOOK Yun-Ho,Yoo Soon-Sung. Владелец: . Дата публикации: 2012-01-05.

BATTERY MANUFACTURING METHOD, BATTERY MANUFACTURED BY SUCH METHOD, VEHICLE AND ELECTRONIC DEVICE

Номер патента: US20120002359A1. Автор: . Владелец: . Дата публикации: 2012-01-05.

OPTICAL DISC, OPTICAL DISC MANUFACTURING METHOD, OPTICAL DISC RECORDING DEVICE AND OPTICAL DISC REPRODUCTION DEVICE

Номер патента: US20120002517A1. Автор: Yamaoka Masaru,Shoji Mamoru,Nishikiori Keiji,Usui Makoto,Moriya Mitsuro. Владелец: . Дата публикации: 2012-01-05.

ZOOM LENS APPARATUS HAVING MOVABLE LENS HOLDER

Номер патента: US20120002301A1. Автор: . Владелец: FUJIFILM Corporation. Дата публикации: 2012-01-05.

PHOTOSENSITIVE COMPOSITION, PATTERN FORMING MATERIAL, AND PHOTOSENSITIVE FILM, PATTERN FORMING METHOD, PATTERN FILM, LOW REFRACTIVE INDEX FILM, OPTICAL DEVICE AND SOLID-STATE IMAGING DEVICE EACH USING THE SAME

Номер патента: US20120003436A1. Автор: . Владелец: FUJIFILM Corporation. Дата публикации: 2012-01-05.

THIN FILM TRANSISTOR SUBSTRATE, DISPLAY DEVICE HAVING THE SAME AND METHOD OF MANUFACTURING THE DISPLAY DEVICE

Номер патента: US20120003769A1. Автор: CHOI Jae-Ho,KIM Sung-Ryul,LEE Czang-Ho,YANG Sung-Hoon,YOON KAP-SOO,Kim Byoung-June,Oh Hwa-Yeul,Choi Yong-Mo. Владелец: SAMSUNG ELECTRONICS CO., LTD.. Дата публикации: 2012-01-05.

ADHESIVE COMPOSITION AND OPTICAL MEMBER USING THE SAME

Номер патента: US20120004369A1. Автор: . Владелец: . Дата публикации: 2012-01-05.

ADJUSTABLE SIGN FRAME AND METHOD OF USING THE SAME

Номер патента: US20120000106A1. Автор: WICK Melinda Jean. Владелец: . Дата публикации: 2012-01-05.

HUMIDITY SENSOR PACKAGE AND MANUFACTURING METHOD THEREOF

Номер патента: US20120000284A1. Автор: Hasegawa Hideki,Yokoyama Shinya,Waga Satoshi,Tondokoro Atsushi,Sakashita Tadashi,Morita Sumihito,Kamimura Hideki,Yamatani Masaya. Владелец: . Дата публикации: 2012-01-05.

Gas mixing device, synthetic gas manufacturing apparatus, gas mixing method, and synthetic gas manufacturing method

Номер патента: US20120001125A1. Автор: Oguro Shuichi,Yamada Nobuhiro. Владелец: JDC CORPORATION. Дата публикации: 2012-01-05.

SQUARE-CELL BATTERY AND MANUFACTURING METHOD FOR SAME

Номер патента: US20120003528A1. Автор: Tani Yuji,Maeda Hitoshi,Fujiwara Masayuki,Shinyashiki Yoshitaka,Kusukawa Masao,Funahashi Atsuhiro. Владелец: SANYO ELECTRIC CO., LTD.. Дата публикации: 2012-01-05.

GRIPPING DEVICE, TRANSFER DEVICE, PROCESSING DEVICE, AND MANUFACTURING METHOD FOR ELECTRONIC DEVICE

Номер патента: US20120004773A1. Автор: . Владелец: SHIBAURA MECHATRONICS CORPORATION. Дата публикации: 2012-01-05.

Facade facing panel fastening set, supporting unit and hanging member for the supporting unit, as well as facade assemblage method

Номер патента: RU2268970C2. Автор: Вячеслав Иванович Полянин,Виктор Николаевич Дрозденко,Вячеслав Викторович Супонов,Сергей Викторович Скачков,Михаил Иванович Чухарев,нин В чеслав Иванович Пол (RU),Виктор Николаевич Дрозденко (RU),В чеслав Викторович Супонов (RU),Сергей Викторович Скачков (RU),Михаил Иванович Чухарев (RU). Владелец: Михаил Иванович Чухарев. Дата публикации: 2006-01-27.

ACTINIC RAY-SENSITIVE OR RADIATION-SENSITIVE RESIN COMPOSITION, AND RESIST FILM AND PATTERN FORMING METHOD USING THE SAME

Номер патента: US20120003590A1. Автор: . Владелец: FUJIFILM Corporation. Дата публикации: 2012-01-05.

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