Ceramic material, method for manufacturing the same, and semiconductor manufacturing apparatus member.

Ceramic material, method for manufacturing the same, and semiconductor manufacturing apparatus member

Номер патента: US09856147B2
Опубликовано: 02-01-2018
Автор(ы): Katsuhiro Inoue, Yosuke Sato, Yuji Katsuda
Принадлежит: NGK Insulators Ltd
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Рисунок 1. Взаимосвязь патентов (ближайшие 20).

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