Verfahren zum photolithographischen metallisieren zumindest der innenseiten von löchern die in zusammenhang mit einem auf einer aus elektrisch isolierendem material bestehende platte befindlichen muster aufgebracht sind

08-04-1999 дата публикации

Номер:

DE0069508019D1

Автор: SPIERINGS GIJBERTUS, HEIJBOER WILLEM, REMEEUS LEO, SPIERINGS, GIJBERTUS, ADRIANUS, CORNELUS, MARI, NL-5621 BA EINDHOVEN, NL, HEIJBOER, WILLEM, LEONARDUS, CORNELIS, MARINU, NL-5621 BA EINDHOVEN, NL, REMEEUS, LEO, OSMAN, NL-5621 BA EINDHOVEN, NL

Принадлежит: KONINKL PHILIPS ELECTRONICS NV, KONINKLIJKE PHILIPS ELECTRONICS N.V., EINDHOVEN, NL

Контакты:

Номер заявки: 19-80-6950

Дата заявки: 04-04-1995

CPC - классификация

G G0 G03 G03F G03F7 G03F7/G03F7/0 G03F7/00 G03F7/000 G03F7/0007 G03F7/001 G03F7/0015 G03F7/1 G03F7/11 G03F7/16 G03F7/164 H H0 H01 H01J H01J2 H01J22 H01J220 H01J2209 H01J2209/H01J2209/0 H01J2209/01 H01J2209/012 H01J23 H01J232 H01J2329 H01J2329/H01J2329/0 H01J2329/00 H01J9 H01J9/H01J9/1 H01J9/14 H01J9/146 H01J9/148 H05 H05K H05K1 H05K1/H05K1/0 H05K1/03 H05K1/030 H05K1/0306 H05K1/09 H05K2 H05K22 H05K220 H05K2201 H05K2201/H05K2201/0 H05K2201/09 H05K2201/095 H05K2201/0958 H05K2201/09581 H05K2203 H05K2203/H05K2203/1 H05K2203/13 H05K2203/135 H05K3 H05K3/H05K3/0 H05K3/00 H05K3/009 H05K3/0094 H05K3/06 H05K3/064 H05K3/3 H05K3/38 H05K3/388

IPC - классификация

C C2 C23 C23F C23F1 C23F1/C23F1/0 C23F1/00 C23F1/02 C25 C25D C25D1 C25D13 C25D13/C25D13/0 C25D13/06 G G0 G03 G03F G03F1 G03F1/G03F1/0 G03F1/08 G03F7 G03F7/G03F7/0 G03F7/00 G03F7/1 G03F7/11 G03F7/16 G03F7/3 G03F7/30 G03F7/4 G03F7/40 H H0 H01 H01J H01J1 H01J17 H01J17/H01J17/4 H01J17/49 H01J3 H01J31 H01J31/H01J31/1 H01J31/12 H01J9 H01J9/H01J9/1 H01J9/14 H01L H01L2 H01L21 H01L21/H01L21/3 H01L21/30 H01L21/306 H05 H05K H05K1 H05K1/H05K1/0 H05K1/03 H05K1/09 H05K3 H05K3/H05K3/0 H05K3/00 H05K3/06 H05K3/3 H05K3/38