Post-CMP cleaning composition and related methods

28-08-2019 дата публикации

Номер:

JP6568198B2

Автор: イバノフローマン, コチュヨン−ユエン

Принадлежит: Cabot Microelectronics Corp

Контакты:

Номер заявки:

Дата заявки:

CPC - классификация

C C1 C11 C11D C11D1 C11D11 C11D11/C11D11/0 C11D11/00 C11D11/004 C11D11/0047 C11D3 C11D3/C11D3/0 C11D3/00 C11D3/007 C11D3/0073 C11D3/008 C11D3/0084 C11D7 C11D7/C11D7/1 C11D7/10 C11D7/2 C11D7/26 C11D7/264 C11D7/265 C11D7/267 C11D7/268 C11D7/3 C11D7/32 C11D7/320 C11D7/3209 C11D7/321 C11D7/3218 C11D7/324 C11D7/3245 C11D7/327 C11D7/3272 C11D7/36 H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/0 H01L21/02 H01L21/020 H01L21/0205 H01L21/02052 H01L21/0207 H01L21/02074 H01L21/3 H01L21/30 H01L21/304 H01L21/32 H01L21/321 H01L21/3212 H01L21/7 H01L21/76 H01L21/768 H01L21/7684

IPC - классификация

C C1 C11 C11D C11D1 C11D11 C11D11/C11D11/0 C11D11/00 C11D11/004 C11D11/0047 C11D7 C11D7/C11D7/1 C11D7/10 C11D7/3 C11D7/36

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