Vacuum treatment apparatus and a method for manufacturing

11-03-2017 дата публикации

Номер:

TWI574341B

Автор: 巴特史考特凡麥斯特, 渥夫甘麗茲勒, 羅傑勞德, 羅夫巴茲蘭, 丹尼爾羅勒, SCHOLTE VON MAST BART, RIETZLER WOLFGANG, LODDER ROGIER, BAZLEN ROLF, ROHRER DANIEL, SCHOLTE VON MAST, BART, RIETZLER, WOLFGANG, LODDER, ROGIER, BAZLEN, ROLF, ROHRER, DANIEL

Принадлежит: 歐瑞康先進科技股份有限公司, OERLIKON ADVANCED TECH AG, OERLIKON ADVANCED TECHNOLOGIES AG

Контакты:

Номер заявки: 75-48-10015

Дата заявки: 27-12-2011

CPC - классификация

C C2 C23 C23C C23C1 C23C14 C23C14/C23C14/5 C23C14/50 C23C14/54 C23C14/541 C23C16 C23C16/C23C16/4 C23C16/44 C23C16/441 C23C16/4412 C23C16/45 C23C16/458 C23C16/5 C23C16/52 F F0 F04 F04B F04B4 F04B45 F04B45/F04B45/0 F04B45/02 H H0 H01 H01J H01J2 H01J22 H01J223 H01J2237 H01J2237/H01J2237/3 H01J2237/33 H01J2237/332 H01J2237/3321 H01J3 H01J37 H01J37/H01J37/3 H01J37/32 H01J37/327 H01J37/3272 H01J37/32724 H01J37/328 H01J37/3283 H01J37/32834 H01L H01L2 H01L21 H01L21/H01L21/6 H01L21/67 H01L21/671 H01L21/6719 H01L21/677 H01L21/6770 H01L21/67703 H01L21/6773 H01L21/67739 H01L21/6774 H01L21/67748 H01L21/6775 H01L21/67751 H01L21/6776 H01L21/68 H01L21/687 H01L21/6874 H01L21/68742 H01L21/6877 H01L21/68771

IPC - классификация

H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/6 H01L21/67 H01L21/677

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