Dry non-plasma treatment system

05-09-2023 дата публикации

Номер:

US0011745202B2

Автор: Martin Kent, Eric J. Strang

Принадлежит: Tokyo Electron Limited

Контакты:

Номер заявки: 09-05-1480

Дата заявки: 15-07-2015

CPC - классификация

B B0 B05 B05B B05B1 B05B12 B05B12/B05B12/0 B05B12/04 B05B12/1 B05B12/12 B05B13 B05B13/B05B13/0 B05B13/02 C C0 C01 C01B C01B7 C01B7/C01B7/1 C01B7/19 C01B7/191 C09 C09K C09K1 C09K13 C09K13/C09K13/0 C09K13/08 C2 C23 C23F C23F1 C23F1/C23F1/0 C23F1/02 C23F1/1 C23F1/12 H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/0 H01L21/00 H01L21/02 H01L21/020 H01L21/0204 H01L21/02049 H01L21/03 H01L21/033 H01L21/0337 H01L21/0338 H01L21/3 H01L21/30 H01L21/302 H01L21/306 H01L21/3062 H01L21/30621 H01L21/31 H01L21/311 H01L21/3111 H01L21/31116 H01L21/6 H01L21/67 H01L21/670 H01L21/6706 H01L21/67069 H01L21/671 H01L21/6710 H01L21/67109 H01L21/672 H01L21/6724 H01L21/67248 H01L21/68 H01L21/687 H01L21/6874 H01L21/68742

IPC - классификация

B B0 B05 B05B B05B1 B05B12 B05B12/B05B12/0 B05B12/04 B05B12/1 B05B12/12 B05B13 B05B13/B05B13/0 B05B13/02 C C0 C01 C01B C01B7 C01B7/C01B7/1 C01B7/19 C09 C09K C09K1 C09K13 C09K13/C09K13/0 C09K13/08 C2 C23 C23F C23F1 C23F1/C23F1/0 C23F1/02 C23F1/1 C23F1/12 C3 C30 C30B C30B3 C30B31 C30B31/C30B31/0 C30B31/04 H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/0 H01L21/02 H01L21/03 H01L21/033 H01L21/3 H01L21/30 H01L21/306 H01L21/31 H01L21/311 H01L21/6 H01L21/67 H01L21/68 H01L21/687

Цитирование НПИ

118/715
118/715
118/724
118/725
126/194
216/101
216/58
257/E21.162
392/416
438/200
Chinese Office Action issued in Application No. 200780023348.0 dated Dec. 4, 2009.
International Preliminary Report on Patentability issued in Application No. PCT/US2007/061037 dated Oct. 9, 2008.
International Search Report issued in Application No. PCT/US2007/067479 dated Jul. 14, 2008.
International Search Report issued in International Application No. PCT/US2007/061037 dated Nov. 1, 2007.
Office Action issued in U.S. Appl. No. 11/390,470 dated Nov. 7, 2008.
Written Opinion issued in Application No. PCT/US2007/067479 dated Jul. 14, 2008.
Written Opinion issued in International Application No. PCT/US2007/061037 dated Nov. 1, 2007.

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