05-10-2017 дата публикации
Номер: US20170287973A1
Принадлежит:
A method of manufacturing an electronic device, comprising fixing a first wafer on a second wafer to form a space theirbetween, via a surrounding member configured to surround the space, forming an opening on a bottom side of the first wafer to expose a conductive member included in the first wafer, and then forming an electrode connected to the conductive member, wherein, in the fixing, the first wafer includes a trench intersecting the surrounding member, on an upper side of the first surface, and, in the forming, the electrode is formed under a condition that the space communicates with an external space via the trench. 1. A method of manufacturing an electronic device , comprising:fixing a first wafer and a second wafer to each other via a surrounding member, such that the first wafer and the second wafer face each other via a space and the surrounding member surrounds the space, the first wafer including a semiconductor substrate and a wiring structure arranged on the semiconductor substrate; andforming an opening on a side of a second surface of the first wafer on an opposite side of a first surface on a side of the second wafer so as to expose a conductive member of the wiring structure, and then forming an electrode connected to the conductive member exposed via the opening,wherein in the fixing, the first wafer includes, on a side of the first surface, a trench that intersects the surrounding member in a planar view of the first surface, andin the forming, the electrode is formed under a condition that the space communicates with an external space via the trench.2. The method according to claim 1 , wherein in the fixing claim 1 , a cover member is arranged between the surrounding member and the trench at a position where the surrounding member intersects the trench in the planar view.3. The method according to claim 2 , wherein the cover member extends up to a position where the surrounding member does not intersect the trench in the planar view claim 2 , ...
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