Compound, radiation-sensitive composition, and method for forming resist pattern .

Compound, radiation-sensitive composition, and method for forming resist pattern

Номер патента: WO2012014435A1
Опубликовано: 02-02-2012
Автор(ы): 越後　雅敏
Принадлежит: 三菱瓦斯化学株式会社
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Рисунок 1. Взаимосвязь патентов (ближайшие 20).

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Glass with modified surface regions and methods and apparatuses for forming the same via electro-thermal poling and field-assisted ion exchange

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Systems and Methods for Forming Wax or Wax-Like Candles or Shells

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Method for delivering a molten silicon composition into porous substrates

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A method for forming the lubricating film on the surface of a lubricant composition and a metal processing material for forming a lubricating film containing hemimorphite, and a metal processing material provided with the lubricating film.

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Composition and method for generating a desired cell type and/or tissue type from hair follicular stem cells

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Composition and method for generating a desired cell type and/or tissue type from hair follicular stem cells

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Method and apparatus for gasifying solid material and method and apparatus for forming thin film

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Solid ammonium polyphosphate compositions and method for the manufacture thereof

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Artificial agglomerated stone article comprising opaque white granulated vitreous material and method for the manufacture of said article

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Protein product and method and apparatus for forming same

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Improvements in catamenial tampon and method and apparatus for forming thesame

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Reversible pile fabric and method and means for forming same

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Radiation-sensitive composition and compound

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Artificial teeth and method and apparatus for forming thesame

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Artificial teeth and method and apparatus for forming thesame

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Pipe cladding and method and apparatus for forming same

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Laminated surfaced board and method and apparatus for forming same

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Material and method and apparatus for forming sanitary napkin attachment loops

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Tabless container opneing device and method and tools for forming thesame

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Pipe coupling joint and method and apparatus for making same

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Method for selecting corn forms resistant to having laid flat

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Containers and method and apparatus for forming same

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Process for making stabilized polyesters used in radiation-sensitive compositions for lithographic plates having improved wear life

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