Mask set, fabrication method of mask set, manufacturing method of semiconductor device, and recording medium.

Mask set, fabrication method of mask set, manufacturing method of semiconductor device, and recording medium

Номер патента: US09703912B2
Опубликовано: 11-07-2017
Автор(ы): Ai Furubayashi, Nobuhiro Komine, Takaki Hashimoto, Takashi Obara
Принадлежит: Toshiba Corp
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Рисунок 1. Взаимосвязь патентов (ближайшие 20).

PELLICLE FRAME, PELLICLE AND METHOD OF MANUFACTURING THE SAME, ORIGINAL PLATE FOR EXPOSURE AND METHOD OF MANUFACTURING THE SAME, EXPOSURE DEVICE, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

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Pellicle frame, pellicle and method of manufacturing the same, original plate for exposure and method of manufacturing the same, exposure device, and method of manufacturing semiconductor device

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Methods of performing a photo process for asymmetric patterns and methods of forming a semiconductor device using thereof

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Photomasks, methods of exposing a substrate to light, methods of forming a pattern, and methods of manufacturing a semiconductor device

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Underlayer composition and method of manufacturing a semiconductor device

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Coating composition for DUV filtering, method of forming a photoresist pattern using the same and method of fabricating a semiconductor device

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Method of manufacturing a semiconductor device whereby photomasks comprising partial patterns are projected onto a photoresist layer so as to merge into one another

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Inputting system and method of keyboard for small smart device, and computer-readable recording medium with program therefor

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POSITION DETECTION METHOD, CONTROL METHOD, MANUFACTURING METHOD, POSITION DETECTION APPARATUS, ROBOT APPARATUS, OPTICAL DEVICE, AND NON-TRANSITORY RECORDING MEDIUM

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System and method of displaying an autograph of the artist(s) of their song(s) on an electronic device and a method for customers to resell autographed MP3/MP4 type music files and the like

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Operating method of memory controller, cloud computing device and edge computer

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Method of impedance matching, electronic device and computer-readable recording medium

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Method of fabricating a semiconductor device

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On-line calculation method of sales allowance, sales allowance calculation system and recording method thereof

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Method of forming a semiconductor device with a multi-layer WSix film with small grain size structure, and a semiconductor device having a polysilicon layer with a multi-layer WSix film formed thereon

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Method of self-calibration of lighting device and lighting device executing this method

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