半導体装置とその製造方法

06-05-1998 дата публикации

Номер:

JPH10116962A

Автор: Hiroyuki Hozoji, Junichi Saeki, Koji Serizawa, Shigeharu Tsunoda, Tetsuo Kumazawa, Toshio Ogawa, 弘二芹沢, 敏夫小川, 準一佐伯, 裕之宝蔵寺, 重晴角田, 鉄雄熊沢

Принадлежит: HITACHI LTD

Контакты:

Номер заявки:

Дата заявки:

CPC - классификация

H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/5 H01L21/56 H01L21/565 H01L22 H01L222 H01L2224 H01L2224/H01L2224/4 H01L2224/45 H01L2224/451 H01L2224/4512 H01L2224/45124 H01L2224/48 H01L2224/480 H01L2224/4809 H01L2224/48091 H01L2224/482 H01L2224/4822 H01L2224/48227 H01L2224/4824 H01L2224/48247 H01L2224/49 H01L2224/491 H01L2224/4917 H01L2224/49171 H01L23 H01L23/H01L23/3 H01L23/31 H01L23/312 H01L23/3121 H01L23/4 H01L23/43 H01L23/433 H01L23/4334 H01L23/49 H01L23/495 H01L23/4956 H01L23/49562 H01L24 H01L24/H01L24/4 H01L24/45 H01L24/48 H01L24/49 H01L25 H01L25/H01L25/0 H01L25/04 H01L29 H01L292 H01L2924 H01L2924/H01L2924/0 H01L2924/01 H01L2924/010 H01L2924/0100 H01L2924/01005 H01L2924/01006 H01L2924/0101 H01L2924/01013 H01L2924/0102 H01L2924/01022 H01L2924/01028 H01L2924/01029 H01L2924/0103 H01L2924/01033 H01L2924/0108 H01L2924/01082 H01L2924/014 H01L2924/04 H01L2924/049 H01L2924/0495 H01L2924/04953 H01L2924/1 H01L2924/18 H01L2924/181

IPC - классификация

H H0 H01 H01L H01L2 H01L23 H01L23/H01L23/4 H01L23/43 H01L23/433 H01L23/4334 H01L24 H01L24/H01L24/4 H01L24/48 H01L24/7 H01L24/78