Single crystal group III nitride articles and method of producing same by HVPE method incorporating a polycrystalline layer for yield enhancement

08-01-2013 дата публикации

Номер:

US8349711B2

Автор: Andrew D. Hanser, Edward A. Preble, Lianghong Liu, N. Mark Williams, Xueping Xu

Принадлежит: Kyma Technologies Inc

Контакты:

Номер заявки:

Дата заявки:

CPC - классификация

C C3 C30 C30B C30B2 C30B25 C30B25/C30B25/0 C30B25/02 C30B25/1 C30B25/18 C30B25/183 C30B29 C30B29/C30B29/4 C30B29/40 C30B29/403 C30B29/406 H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/0 H01L21/02 H01L21/023 H01L21/0237 H01L21/0238 H01L21/02389 H01L21/024 H01L21/0242 H01L21/0243 H01L21/02433 H01L21/0245 H01L21/02458 H01L21/025 H01L21/0250 H01L21/02502 H01L21/02505 H01L21/0254 H01L21/0257 H01L21/0258 H01L21/02581 H01L21/0259 H01L21/02595 H01L21/026 H01L21/0262 H01L21/0263 H01L21/02631 H01L21/0269 H01L21/02694 H01L29 H01L29/H01L29/0 H01L29/04 H01L29/06 H01L29/068 H01L29/0688 H01L29/2 H01L29/20 H01L29/200 H01L29/2003 H01L3 H01L33 H01L33/H01L33/0 H01L33/00 H01L33/007 H01L33/3 H01L33/30 H01L33/32

IPC - классификация

C C3 C30 C30B C30B2 C30B25 C30B25/C30B25/1 C30B25/18 C30B29 C30B29/C30B29/4 C30B29/40 C30B29/403 C30B9 C30B9/C30B9/1 C30B9/10

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