Integration of split gate flash memory array and logic devices

17-10-2017 дата публикации

Номер:

US09793280B2

Автор: Chien-Sheng Su, Chun-Ming Chen, Jeng-Wei Yang, Man-Tang Wu, Nhan Do

Принадлежит: Silicon Storage Technology Inc

Контакты:

Номер заявки:

Дата заявки:

CPC - классификация

G G1 G11 G11C G11C1 G11C16 G11C16/G11C16/0 G11C16/04 G11C16/042 G11C16/0425 H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/2 H01L21/28 H01L21/282 H01L21/2827 H01L21/28273 H01L27 H01L27/H01L27/1 H01L27/11 H01L27/115 H01L27/1153 H01L27/11531 H01L27/11534 H01L29 H01L29/H01L29/4 H01L29/40 H01L29/401 H01L29/4011 H01L29/40114 H01L29/42 H01L29/423 H01L29/4232 H01L29/42328 H01L29/6 H01L29/66 H01L29/668 H01L29/6682 H01L29/66825 H1 H10 H10B H10B4 H10B41 H10B41/H10B41/4 H10B41/42 H10B41/43

IPC - классификация

H H0 H01 H01L H01L2 H01L27 H01L27/H01L27/1 H01L27/11 H01L27/115 H01L27/1153 H01L27/11534 H01L27/11536

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