Acidic chemistry for Post-CMP cleaning using a composition comprising mercaptopropionic acid

20-11-2007 дата публикации

Номер:

US7297670B2

Автор: Ashutosh Misra, Matthew L. Fisher

Принадлежит: Air Liquide America LP

Контакты:

Номер заявки:

Дата заявки:

CPC - классификация

C C1 C11 C11D C11D1 C11D11 C11D11/C11D11/0 C11D11/00 C11D11/004 C11D11/0047 C11D3 C11D3/C11D3/0 C11D3/00 C11D3/007 C11D3/0073 C11D3/2 C11D3/20 C11D3/207 C11D3/2072 C11D3/2075 C11D3/208 C11D3/2082 C11D3/2086 C11D3/209 C11D3/2096 C11D3/22 C11D3/221 C11D3/28 C11D3/3 C11D3/33 C11D3/34 C11D3/342 C11D3/3427 C11D3/347 C11D3/3472 C11D3/348 C11D3/3481 C11D3/349 C11D7 C11D7/C11D7/2 C11D7/26 C11D7/264 C11D7/265 C11D7/267 C11D7/3 C11D7/32 C11D7/324 C11D7/3245 C11D7/326 C11D7/3263 C11D7/327 C11D7/3272 C11D7/328 C11D7/3281 C11D7/34 C2 C23 C23G C23G1 C23G1/C23G1/1 C23G1/10 C23G1/103

IPC - классификация

C C1 C11 C11D C11D1 C11D11 C11D11/C11D11/0 C11D11/00 C11D11/004 C11D11/0047 C11D3 C11D3/C11D3/3 C11D3/33 C11D7 C11D7/C11D7/3 C11D7/34

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