Semiconductor device and manufacturing method thereof

26-02-2008 дата публикации

Номер:

US7335911B2

Автор: Hideomi Suzawa, Koji Ono, Shunpei Yamazaki, Yasuyuki Arai

Принадлежит: Semiconductor Energy Laboratory Co Ltd

Контакты:

Номер заявки:

Дата заявки:

CPC - классификация

G G0 G02 G02F G02F1 G02F1/G02F1/1 G02F1/13 G02F1/134 G02F1/1345 G02F1/13454 H H0 H01 H01L H01L2 H01L20 H01L202 H01L2029 H01L2029/H01L2029/7 H01L2029/78 H01L2029/786 H01L2029/7863 H01L21 H01L21/H01L21/3 H01L21/32 H01L21/321 H01L21/3213 H01L21/32136 H01L27 H01L27/H01L27/1 H01L27/12 H01L27/122 H01L27/1222 H01L27/123 H01L27/1237 H01L27/124 H01L27/127 H01L27/1277 H01L29 H01L29/H01L29/4 H01L29/42 H01L29/423 H01L29/4238 H01L29/42384 H01L29/49 H01L29/490 H01L29/4908 H01L29/6 H01L29/66 H01L29/667 H01L29/6675 H01L29/66757 H01L29/7 H01L29/78 H01L29/786 H01L29/7862 H01L29/78621 H01L29/78627 H01L29/7864 H01L29/78645

IPC - классификация

G G0 G02 G02F G02F1 G02F1/G02F1/1 G02F1/13 G02F1/133 G02F1/1333 G02F1/13330 G02F1/133305 H H0 H01 H01L H01L2 H01L27 H01L27/H01L27/1 H01L27/12 H01L27/124 H01L29 H01L29/H01L29/4 H01L29/49 H01L29/490 H01L29/4908

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