MEMS MICROPHONE HAVING DUAL BACK PLATE AND METHOD FOR MANUFACTURING SAME

14-11-2013 дата публикации
Номер:
WO2013168868A1
Контакты:
Номер заявки: KR02-01-201259
Дата заявки: 29-11-2012



[0000]

Disclosed are a MEMS microphone having a dual back plate and a method for manufacturing same. The MEMS microphone according to an embodiment of the present invention includes: a substrate on which a first back plate is disposed on a central portion thereof; a membrane plate disposed on a first support part disposed on each of the two sides of the top surface of the substrate, the membrane plate being oscillated according to an external acoustic pressure; and a second back plate disposed on a second support part disposed on each of the two sides of the top surface of the membrane plate.

[1]