Metal cap for contact resistance reduction

28-07-2022 дата публикации

Номер:

WO2022159152A1

Автор: Avgerinos V. Gelatos, Bencherki Mebarki, Jianxin Lei, Joung Joo Lee, Liqi Wu, Raymond Hoiman Hung, Tae Hong Ha, Takashi KURATOMI, Wenting Hou, Xianmin Tang

Принадлежит: Applied Materials, Inc.

Контакты:

Номер заявки:

Дата заявки:

CPC - классификация

H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/2 H01L21/28 H01L21/285 H01L21/2851 H01L21/28518 H01L21/2855 H01L21/2856 H01L21/28562 H01L21/7 H01L21/76 H01L21/768 H01L21/7684 H01L21/76843 H01L21/8 H01L21/82 H01L21/823 H01L21/8234 H01L21/82341 H01L21/823418 H01L21/82342 H01L21/823425 H01L21/82347 H01L21/823475 H01L23 H01L23/H01L23/4 H01L23/48 H01L23/485 H01L23/5 H01L23/53 H01L23/532 H01L23/5326 H01L23/53266 H01L27 H01L27/H01L27/0 H01L27/08 H01L27/088 H01L29 H01L29/H01L29/4 H01L29/41 H01L29/417 H01L29/4179 H01L29/41791

IPC - классификация

G G0 G01 G01S G01S1 G01S1/G01S1/6 G01S1/64 H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/2 H01L21/28 H01L21/285 H01L21/2851 H01L21/28518 H01L24 H01L24/H01L24/0 H01L24/05

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