Plasma-assisted atomic layer epitaxy of cubic and hexagonal InN films and its alloys with AIN at low temperatures

13-09-2022 дата публикации

Номер:

US0011443942B2

Автор: Neeraj Nepal, Charles R. Eddy, Jr., Nadeemullah A. Mahadik, Syed B. Qadri, Michael J. Mehl

Принадлежит: The Government of the United States of America, as represented by the Secretary of the Navy

Контакты:

Номер заявки: 44-83-1569

Дата заявки: 07-09-2017

CPC - классификация

C C3 C30 C30B C30B2 C30B25 C30B25/C30B25/0 C30B25/02 C30B25/2 C30B25/20 C30B25/205 C30B29 C30B29/C30B29/3 C30B29/38 C30B29/4 C30B29/40 C30B29/403 H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/0 H01L21/02 H01L21/023 H01L21/0238 H01L21/02381 H01L21/024 H01L21/0242 H01L21/0243 H01L21/02433 H01L21/0245 H01L21/02458 H01L21/025 H01L21/0254 H01L21/026 H01L21/0262 H01L21/0266 H01L21/02661 H01L21/2 H01L21/20 H01L21/205 H01L29 H01L29/H01L29/2 H01L29/20 H01L29/200 H01L29/2003

IPC - классификация

C C3 C30 C30B C30B2 C30B25 C30B25/C30B25/0 C30B25/02 C30B25/1 C30B25/18 C30B25/2 C30B25/20 C30B29 C30B29/C30B29/3 C30B29/38 C30B29/4 C30B29/40 C30B29/403 H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/0 H01L21/02 H01L29 H01L29/H01L29/2 H01L29/20

Цитирование НПИ

257/194
257/76
257/88
438/680
Cryst. Growth Des. 2013, 13, 1485-1490.
Vahak Marghussian, Nano-Glass Ceramics, Processing, Properties and Applications, 2015, pp. 1-62 (Year: 2015).

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