Charged particle beam system and method of operating a charged particle beam system

03-01-2017 дата публикации

Номер:

US9536699B2

Автор: Alexander Groholski, FHM-Faridur Rahman, John A. Notte, IV, Raymond Hill, Shawn Mcvey, Weijie Huang

Принадлежит: Carl Zeiss Microscopy LLC

Контакты:

Номер заявки:

Дата заявки:

CPC - классификация

G G2 G21 G21K G21K5 G21K5/G21K5/0 G21K5/04 H H0 H01 H01J H01J2 H01J22 H01J223 H01J2237 H01J2237/H01J2237/0 H01J2237/00 H01J2237/002 H01J2237/02 H01J2237/021 H01J2237/0216 H01J2237/03 H01J2237/032 H01J2237/06 H01J2237/065 H01J2237/0653 H01J2237/08 H01J2237/080 H01J2237/0807 H01J2237/1 H01J2237/15 H01J2237/150 H01J2237/1501 H01J2237/1502 H01J2237/18 H01J2237/182 H01J2237/1825 H01J2237/188 H01J2237/2 H01J2237/20 H01J2237/202 H01J2237/2020 H01J2237/20207 H01J2237/2021 H01J2237/20214 H01J2237/2022 H01J2237/20221 H01J2237/2023 H01J2237/20235 H01J27 H01J27/H01J27/2 H01J27/26 H01J3 H01J37 H01J37/H01J37/0 H01J37/08 H01J37/1 H01J37/18

IPC - классификация

H H0 H01 H01J H01J2 H01J27 H01J27/H01J27/1 H01J27/14 H01J27/2 H01J27/22 H01J3 H01J37 H01J37/H01J37/1 H01J37/18

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