Semiconductor device with reduced resistance and method for manufacturing the same

26-12-2023 дата публикации

Номер:

US0011854973B2

Автор: Fei Fan DUAN, Fong-Yuan CHANG, Chi-Yu LU, Po-Hsiang Huang, Chih-Liang Chen

Принадлежит: Taiwan Semiconductor Manufacturing Company, Ltd.

Контакты:

Номер заявки: 41-91-1738

Дата заявки: 29-07-2021

CPC - классификация

G G0 G03 G03F G03F1 G03F1/G03F1/3 G03F1/36 G06 G06F G06F2 G06F21 G06F211 G06F2119 G06F2119/G06F2119/1 G06F2119/12 G06F3 G06F30 G06F30/G06F30/3 G06F30/39 G06F30/392 G06F30/398 H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/7 H01L21/76 H01L21/768 H01L21/7689 H01L21/76895 H01L21/8 H01L21/82 H01L21/823 H01L21/8234 H01L21/82347 H01L21/823475 H01L23 H01L23/H01L23/5 H01L23/52 H01L23/522 H01L23/5226 H01L23/528 H01L23/5283 H01L23/53 H01L23/532 H01L23/5320 H01L23/53209 H01L27 H01L27/H01L27/0 H01L27/02 H01L27/020 H01L27/0207 Y Y1 Y10 Y10S Y10S7 Y10S71 Y10S715 Y10S715/Y10S715/9 Y10S715/96 Y10S715/964

IPC - классификация

G G0 G03 G03F G03F1 G03F1/G03F1/3 G03F1/36 G06 G06F G06F1 G06F11 G06F119 G06F119/G06F119/1 G06F119/12 G06F3 G06F30 G06F30/G06F30/3 G06F30/39 G06F30/392 G06F30/394 G06F30/3947 G06F30/398 H H0 H01 H01L H01L2 H01L23 H01L23/H01L23/5 H01L23/52 H01L23/522 H01L23/528 H01L23/53 H01L23/532

Цитирование НПИ

257/390
Office Action dated May 8, 2022 for corresponding case No. DE 10 2021 120 078.4. (p. 1).

Получить PDF