MULTISTATION COATING DEVICE AND METHOD FOR PLASMA COATING
04-12-2003 дата публикации
Номер:
WO0003100121A2
Автор: BEHLE, Stephan, LÜTTRINGHAUS-HENKEL, Andreas, ARNOLD, Gregor, BICKER, Matthias, WALTHER, Marten
Принадлежит:
Контакты:
Номер заявки: EP0305497
Дата заявки: 26-05-2003
In order to simplify insertion and removal of work pieces (25, 27) in a reactor for plasma coating and to increase throughput, the invention provides for a coating device (1) comprising a reactor (18) with a movable sleeve part (19) and a base element (33), wherein at least one sealed coating chamber (15, 17) is defined between the sleeve part (19) and the base part (33) in side-by-side position, in addition to a device (2) for discharging electromagnetic energy in the at least one coating chamber (15, 17), wherein the reactor (18) has at least two coating stations (12, 14).[1][2][3][4][5][6][7][8][9][10][11][12][13][14][15][16][17][18][19][20][21][22][23][24][25][26][27][28][29][30][31][32][33][34][35][36][37][38][39][40][41][42]
