Chemical-mechanical planarization slurries and powders and methods for using same

04-05-2004 дата публикации

Номер:

US6730245B2

Автор: Daniel J. Skamser, James Caruso, Mark J. Hampden-Smith, Quint H. Powell, Toivo T. Kodas

Принадлежит: Superior MicroPowders LLC

Контакты:

Номер заявки:

Дата заявки:

CPC - классификация

B B0 B01 B01J B01J2 B01J2/B01J2/0 B01J2/00 B01J2/003 B01J2/006 B01J2/02 B01J2/04 B01J22 B01J221 B01J2219 B01J2219/B01J2219/0 B01J2219/00 B01J2219/001 B01J2219/0015 B01J2219/00155 B01J2219/00159 B01J2219/0016 B01J2219/00162 B01J2219/00166 B01J2219/0017 B01J2219/00171 B01J2219/0018 B01J2219/00186 B2 B24 B24B B24B3 B24B37 B24B37/B24B37/0 B24B37/04 B24B37/044 B8 B82 B82Y B82Y3 B82Y30 B82Y30/B82Y30/0 B82Y30/00 C C0 C01 C01B C01B1 C01B13 C01B13/C01B13/1 C01B13/18 C01B13/185 C01B17 C01B17/C01B17/2 C01B17/20 C01F C01F1 C01F17 C01F17/C01F17/2 C01F17/23 C01F17/235 C01G C01G1 C01G15 C01G15/C01G15/0 C01G15/00 C01G15/006 C01G2 C01G23 C01G23/C01G23/0 C01G23/00 C01G23/003 C01G23/006 C01G25 C01G25/C01G25/0 C01G25/00 C01P C01P2 C01P20 C01P200 C01P2002 C01P2002/C01P2002/6 C01P2002/60 C01P2002/7 C01P2002/70 C01P2004 C01P2004/C01P2004/0 C01P2004/03 C01P2004/3 C01P2004/32 C01P2004/34 C01P2004/5 C01P2004/50 C01P2004/52 C01P2004/6 C01P2004/61 C01P2004/62 C01P2004/8 C01P2004/80 C01P2006 C01P2006/C01P2006/1 C01P2006/10 C01P2006/6 C01P2006/60 C01P2006/8 C01P2006/80 C09 C09G C09G1 C09G1/C09G1/0 C09G1/02 C09K C09K3 C09K3/C09K3/1 C09K3/14 C09K3/143 C09K3/1436 C09K3/146 C09K3/1463 H H0 H01 H01G H01G4 H01G4/H01G4/0 H01G4/00 H01G4/008 H01G4/0085 H01J H01J2 H01J29 H01J29/H01J29/2 H01J29/20 H01L H01L2 H01L21 H01L21/H01L21/3 H01L21/32 H01L21/321 H01L21/3212 H01L23 H01L23/H01L23/4 H01L23/49 H01L23/498 H01L23/4988 H01L23/49883 H01L29 H01L292 H01L2924 H01L2924/H01L2924/0 H01L2924/00 H01L2924/000 H01L2924/0002

IPC - классификация

B B8 B82 B82Y B82Y3 B82Y30 B82Y30/B82Y30/0 B82Y30/00 C C0 C01 C01B C01B1 C01B13 C01B13/C01B13/1 C01B13/18 C01B17 C01B17/C01B17/2 C01B17/20

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