Method of laser irradiation, laser irradiation apparatus, and method of manufacturing a semiconductor device

13-08-2013 дата публикации

Номер:

US8507334B2

Автор: Koichiro Tanaka, Tomoaki Moriwaka

Принадлежит: Semiconductor Energy Laboratory Co Ltd

Контакты:

Номер заявки:

Дата заявки:

CPC - классификация

B B2 B23 B23K B23K2 B23K26 B23K26/B23K26/0 B23K26/06 B23K26/060 B23K26/0604 B23K26/064 B23K26/07 B23K26/073 B23K26/0732 B23K26/0736 B23K26/0738 G G0 G02 G02B G02B2 G02B27 G02B27/G02B27/0 G02B27/09 G02B27/095 G02B27/0955 H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/0 H01L21/02 H01L21/024 H01L21/0242 H01L21/02422 H01L21/025 H01L21/0253 H01L21/02532 H01L21/026 H01L21/0267 H01L21/02678 H01L21/0268 H01L21/02683 H01L21/02686 H01L21/2 H01L21/20 H01L21/202 H01L21/2026 H01L21/26 H01L21/268 H01L21/28 H01L21/280 H01L21/2801 H01L21/28017 H01L27 H01L27/H01L27/1 H01L27/12 H01L27/128 H01L27/1285 H01L3 H01L33 H01L33/H01L33/0 H01L33/08 H01S H01S3 H01S3/H01S3/0 H01S3/00 H01S3/005 H01S5 H01S5/H01S5/4 H01S5/40 H01S5/401 H01S5/4012 H01S5/402 H01S5/4025 H1 H10 H10K H10K5 H10K50 H10K50/H10K50/8 H10K50/84 H10K50/842 H10K50/8426 H10K59 H10K59/H10K59/1 H10K59/12 H10K59/122

IPC - классификация

H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/0 H01L21/02 H01L21/024 H01L21/0242 H01L21/02422 H01L21/2 H01L21/26 H01L21/268 H01S H01S5 H01S5/H01S5/0 H01S5/02 H01S5/022 H01S5/0225 H01S5/02251

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