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Method of making semiconductor device

Номер патента: RU2584273C1
Опубликовано: 20-05-2016
Автор(ы): Асламбек Идрисович Хасанов, Гасан Абакарович Мустафаев, Магомед-Али Вахаевич Зубхаджиев
Принадлежит: Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования Чеченский государственный университет (ФГБОУ ВПО Чеченский государственный университет)
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