Aluminum and copper bimetallic bond pad scheme for copper damascene interconnects

23-04-2002 дата публикации

Номер:

US6376353B1

Автор: Mei Sheng Zhou, Sangki Hong, Simon Chooi

Принадлежит: Chartered Semiconductor Manufacturing Pte Ltd

Контакты:

Номер заявки:

Дата заявки:

CPC - классификация

H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/3 H01L21/32 H01L21/321 H01L21/3213 H01L21/32134 H01L21/7 H01L21/76 H01L21/768 H01L21/7680 H01L21/76807 H01L21/7684 H01L21/76849 H01L22 H01L222 H01L2224 H01L2224/H01L2224/0 H01L2224/02 H01L2224/021 H01L2224/0212 H01L2224/02126 H01L2224/0216 H01L2224/02166 H01L2224/04 H01L2224/040 H01L2224/0404 H01L2224/04042 H01L2224/05 H01L2224/050 H01L2224/0507 H01L2224/05073 H01L2224/0509 H01L2224/05093 H01L2224/05096 H01L2224/051 H01L2224/0516 H01L2224/05166 H01L2224/0518 H01L2224/05181 H01L2224/05184 H01L2224/05187 H01L2224/055 H01L2224/0554 H01L2224/05546 H01L2224/05547 H01L2224/0557 H01L2224/05576 H01L2224/056 H01L2224/0562 H01L2224/05624 H01L2224/0564 H01L2224/05647 H01L2224/4 H01L2224/45 H01L2224/450 H01L2224/4501 H01L2224/45015 H01L2224/451 H01L2224/4512 H01L2224/45124 H01L2224/4514 H01L2224/45144 H01L2224/45147 H01L2224/48 H01L2224/484 H01L2224/4846 H01L2224/48463 H01L2224/486 H01L2224/4862 H01L2224/48624 H01L2224/4864 H01L2224/48647 H01L2224/4869 H01L2224/48699 H01L2224/487 H01L2224/4872 H01L2224/48724 H01L2224/4874 H01L2224/48747 H01L2224/488 H01L2224/4884 H01L2224/48847 H01L24 H01L24/H01L24/0 H01L24/05 H01L24/4 H01L24/45 H01L24/48 H01L29 H01L292 H01L2924 H01L2924/H01L2924/0 H01L2924/01 H01L2924/010 H01L2924/0100 H01L2924/01005 H01L2924/01006 H01L2924/01007 H01L2924/0101 H01L2924/01013 H01L2924/01014 H01L2924/01018 H01L2924/0102 H01L2924/01022 H01L2924/01029 H01L2924/0105 H01L2924/0107 H01L2924/01072 H01L2924/01073 H01L2924/01074 H01L2924/01076 H01L2924/01078 H01L2924/01079 H01L2924/013 H01L2924/0132 H01L2924/01327 H01L2924/014 H01L2924/04 H01L2924/049 H01L2924/0494 H01L2924/04941 H01L2924/0495 H01L2924/04953 H01L2924/05 H01L2924/050 H01L2924/0504 H01L2924/05042 H01L2924/1 H01L2924/13 H01L2924/130 H01L2924/1306 H01L2924/1309 H01L2924/13091 H01L2924/14

IPC - классификация

C C2 C23 C23F C23F1 C23F1/C23F1/2 C23F1/26 C23F1/3 C23F1/38 H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/3 H01L21/32

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