Method of electroplating photoresist defined features from copper electroplating baths containing reaction products of pyridyl alkylamines and bisepoxides

07-09-2017 дата публикации

Номер:

KR101776060B1

Автор: 니아짐베토바 주흐라, 레딩턴 에릭, 르페브르 마크, 웨어팅크 줄리아, 치에비스체크 조안나, 친 이, 토르세트 매튜

Принадлежит: 다우 글로벌 테크놀로지스 엘엘씨, 롬 앤드 하스 일렉트로닉 머트어리얼즈 엘엘씨

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CPC - классификация

C C0 C07 C07D C07D3 C07D30 C07D303 C07D303/C07D303/0 C07D303/04 C2 C25 C25D C25D3 C25D3/C25D3/3 C25D3/38 C25D5 C25D5/C25D5/0 C25D5/02 C25D5/022 C25D7 C25D7/C25D7/0 C25D7/00 C25D7/1 C25D7/12 C25D7/123 G G0 G03 G03F G03F7 G03F7/G03F7/0 G03F7/00 G03F7/000 G03F7/0002 G03F7/4 G03F7/40 G03F7/405 H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/0 H01L21/02 H01L21/027 H01L21/0274 H01L22 H01L222 H01L2224 H01L2224/H01L2224/0 H01L2224/03 H01L2224/034 H01L2224/0346 H01L2224/03462 H01L2224/0347 H01L2224/03472 H01L2224/05 H01L2224/050 H01L2224/0501 H01L2224/05015 H01L2224/051 H01L2224/0514 H01L2224/05147 H01L2224/1 H01L2224/11 H01L2224/114 H01L2224/1146 H01L2224/11462 H01L2224/1147 H01L2224/11472 H01L2224/13 H01L2224/131 H01L2224/1314 H01L2224/13147 H01L24 H01L24/H01L24/0 H01L24/03 H01L24/06 H01L24/1 H01L24/11 H01L24/14 H05 H05K H05K1 H05K1/H05K1/1 H05K1/11 H05K1/111 H05K2 H05K22 H05K220 H05K2201 H05K2201/H05K2201/0 H05K2201/09 H05K2201/092 H05K2201/0920 H05K2201/09209 H05K3 H05K3/H05K3/0 H05K3/06 H05K3/064 H05K3/4 H05K3/40 H05K3/400 H05K3/4007

IPC - классификация

B B4 B41 B41K B41K3 B41K3/B41K3/2 B41K3/28 C C0 C07 C07D C07D3 C07D30 C07D303 C07D303/C07D303/0 C07D303/04 C2 C25 C25D C25D3 C25D3/C25D3/3 C25D3/38

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