Niobium compound and method of forming thin film

11-10-2022 дата публикации

Номер:

US11466043B2

Автор: Akio Saito, Gyuhee PARK, Jaesoon Lim, Seungmin Ryu, Soyoung LEE, Takanori Koide, Wakana FUSE, Younjoung CHO, Yutaro Aoki

Принадлежит: Adeka Corp, Samsung Electronics Co Ltd

Контакты:

Номер заявки:

Дата заявки:

CPC - классификация

C C0 C01 C01B C01B2 C01B21 C01B21/C01B21/0 C01B21/06 C01B21/061 C01B21/0617 C01P C01P2 C01P20 C01P200 C01P2006 C01P2006/C01P2006/4 C01P2006/40 C07 C07F C07F1 C07F15 C07F15/C07F15/0 C07F15/00 C07F17 C07F17/C07F17/0 C07F17/00 C07F9 C07F9/C07F9/0 C07F9/00 C09 C09D C09D1 C09D1/C09D1/0 C09D1/00 C2 C23 C23C C23C1 C23C16 C23C16/C23C16/1 C23C16/18 C23C16/3 C23C16/34 C23C16/4 C23C16/40 C23C16/405 C23C16/42 C23C16/45 C23C16/455 C23C16/4552 C23C16/45525 C23C16/4555 C23C16/45553 C23C16/5 C23C16/50 C23C16/52 C23C16/56 H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/0 H01L21/02 H01L21/026 H01L21/0269 H01L21/02697 H01L21/2 H01L21/28 H01L21/280 H01L21/2808 H01L21/28088 H01L21/281 H01L21/2819 H01L21/28194 H01L21/285 H01L21/2855 H01L21/28556 H01L21/2856 H01L21/28568 H01L21/3 H01L21/32 H01L21/320 H01L21/3205 H01L21/32051 H01L28 H01L28/H01L28/6 H01L28/60 H01L29 H01L29/H01L29/5 H01L29/51 H01L29/513 H01L29/517 H01L29/6 H01L29/66 H01L29/665 H01L29/6654 H01L29/66545 H01L29/7 H01L29/78 H01L29/785

IPC - классификация

C C2 C23 C23C C23C1 C23C16 C23C16/C23C16/1 C23C16/18 C23C16/5 C23C16/56 H H0 H01 H01L H01L2 H01L29 H01L29/H01L29/5 H01L29/51 H01L29/513

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