SEMICONDUCTOR DEVICE HAVING CARBON NANOTUBE INTERCONNECTS AND METHOD OF FABRICATION

11-10-2007 дата публикации

Номер:

US2007235713A1

Автор: SWIRBEL THOMAS J, SWIRBEL THOMAS J.

Принадлежит:

Контакты:

Номер заявки: 06-78-2784

Дата заявки: 03-04-2006

An integrated circuit having carbon nanotube interconnects contains input/output pads situated on the upper surface, the pads arranged in an array having at least two rows. Carbon nanotubes are disposed on the input/output pads to provide electrical and thermal interconnection of the integrated circuit chip to another circuit such as a printed circuit board. The carbon nanotubes can be plated with one or more overlayers of metal.

CPC - классификация

B B8 B82 B82Y B82Y1 B82Y10 B82Y10/B82Y10/0 B82Y10/00 H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/7 H01L21/76 H01L21/768 H01L21/7687 H01L21/76874 H01L22 H01L222 H01L2221 H01L2221/H01L2221/1 H01L2221/10 H01L2221/109 H01L2221/1094 H01L2224 H01L2224/H01L2224/0 H01L2224/04 H01L2224/040 H01L2224/0401 H01L2224/05 H01L2224/055 H01L2224/0555 H01L2224/05555 H01L2224/06 H01L2224/061 H01L2224/0613 H01L2224/06135 H01L2224/1 H01L2224/11 H01L2224/114 H01L2224/1146 H01L2224/11464 H01L2224/116 H01L2224/13 H01L2224/130 H01L2224/1308 H01L2224/131 H01L2224/1311 H01L2224/13111 H01L2224/13116 H01L2224/1314 H01L2224/13144 H01L2224/13147 H01L2224/1315 H01L2224/13155 H01L2224/1316 H01L2224/13164 H01L24 H01L24/H01L24/1 H01L24/11 H01L24/13 H01L29 H01L29/H01L29/0 H01L29/06 H01L29/066 H01L29/0665 H01L29/067 H01L29/0673 H01L292 H01L2924 H01L2924/H01L2924/0 H01L2924/00 H01L2924/000 H01L2924/0001 H01L2924/00013 H01L2924/01 H01L2924/010 H01L2924/0100 H01L2924/01006 H01L2924/0101 H01L2924/01019 H01L2924/0102 H01L2924/01029 H01L2924/0103 H01L2924/01033 H01L2924/0107 H01L2924/01074 H01L2924/01078 H01L2924/01079 H01L2924/0108 H01L2924/01082 H01L2924/014 H01L2924/1 H01L2924/10 H01L2924/102 H01L2924/1025 H01L2924/10253 H01L2924/14 H01L2924/3 H01L2924/30 H01L2924/301 H01L2924/3010 H01L2924/30107

IPC - классификация

H H0 H01 H01L H01L2 H01L29 H01L29/H01L29/0 H01L29/06 H01L4 H01L47 H01L47/H01L47/0 H01L47/02