Separation method of semiconductor device

27-09-2011 дата публикации

Номер:

US8026152B2

Автор: Hideaki Kuwabara, Junya Maruyama, Shunpei Yamazaki, Toru Takayama, Yumiko Ohno, Yuugo Goto

Принадлежит: Semiconductor Energy Laboratory Co Ltd

Контакты:

Номер заявки:

Дата заявки:

CPC - классификация

H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/6 H01L21/68 H01L21/683 H01L21/6835 H01L22 H01L222 H01L2221 H01L2221/H01L2221/6 H01L2221/68 H01L2221/683 H01L2221/6835 H01L2221/68354 H01L2221/68359 H01L2221/6836 H01L2221/68363 H01L2221/68368 H01L2224 H01L2224/H01L2224/1 H01L2224/16 H01L2224/161 H01L2224/1614 H01L2224/16145 H01L2224/162 H01L2224/1622 H01L2224/16225 H01L2224/3 H01L2224/32 H01L2224/321 H01L2224/3214 H01L2224/32145 H01L2224/322 H01L2224/3222 H01L2224/32225 H01L2224/4 H01L2224/48 H01L2224/480 H01L2224/4809 H01L2224/48091 H01L2224/482 H01L2224/4822 H01L2224/48227 H01L2224/7 H01L2224/73 H01L2224/732 H01L2224/7320 H01L2224/73204 H01L2224/7326 H01L2224/73265 H01L2224/8 H01L2224/81 H01L2224/818 H01L2224/8180 H01L2224/81801 H01L2224/9 H01L2224/92 H01L2224/922 H01L2224/9224 H01L2224/92247 H01L23 H01L23/H01L23/5 H01L23/53 H01L23/538 H01L23/5385 H01L23/5388 H01L24 H01L24/H01L24/4 H01L24/48 H01L24/7 H01L24/73 H01L24/8 H01L24/81 H01L27 H01L27/H01L27/0 H01L27/06 H01L27/068 H01L27/0688 H01L27/1 H01L27/12 H01L29 H01L29/H01L29/6 H01L29/66 H01L29/667 H01L29/6675 H01L29/66757 H01L292 H01L2924 H01L2924/H01L2924/0 H01L2924/00 H01L2924/000 H01L2924/0001 H01L2924/00014 H01L2924/01 H01L2924/010 H01L2924/0100 H01L2924/01005 H01L2924/01006 H01L2924/0101 H01L2924/01012 H01L2924/01013 H01L2924/0102 H01L2924/01023 H01L2924/01024 H01L2924/01025 H01L2924/01029 H01L2924/0103 H01L2924/01033 H01L2924/0104 H01L2924/01041 H01L2924/01042 H01L2924/01045 H01L2924/01046 H01L2924/01047 H01L2924/0105 H01L2924/01055 H01L2924/01056 H01L2924/0106 H01L2924/0107 H01L2924/01073 H01L2924/01074 H01L2924/01077 H01L2924/01078 H01L2924/01079 H01L2924/0108 H01L2924/01082 H01L2924/01087 H01L2924/014 H01L2924/1 H01L2924/10 H01L2924/102 H01L2924/1025 H01L2924/10253 H01L2924/12 H01L2924/120 H01L2924/1203 H01L2924/12034 H01L2924/1204 H01L2924/12042 H01L2924/13 H01L2924/130 H01L2924/1306 H01L2924/13063 H01L2924/13064 H01L2924/14 H01L2924/142 H01L2924/1423 H01L2924/15 H01L2924/153 H01L2924/1531 H01L2924/15311 H01L2924/157 H01L2924/1578 H01L2924/15787 H01L2924/15788 H01L2924/18 H01L2924/181 H01L2924/19 H01L2924/190 H01L2924/1904 H01L2924/19041 H01L2924/19042 H01L2924/19043 H01L2924/191 H01L2924/1910 H01L2924/19105 H01L2924/3 H01L2924/30 H01L2924/301 H01L2924/3011 H03 H03H H03H3 H03H3/H03H3/0 H03H3/08

IPC - классификация

H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/8 H01L21/86 H01L24 H01L24/H01L24/4 H01L24/48 H01L24/7 H01L24/78

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