Three-dimensional integrated circuit structures and methods of forming the same

08-10-2024 дата публикации

Номер:

US12113027B2

Автор: Chung-Yu Lu, Ping-Kang Huang, Sao-Ling Chiu

Принадлежит: Taiwan Semiconductor Manufacturing Co TSMC Ltd

Контакты:

Номер заявки:

Дата заявки:

CPC - классификация

H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/4 H01L21/48 H01L21/485 H01L21/4853 H01L21/4857 H01L21/486 H01L21/5 H01L21/56 H01L21/563 H01L22 H01L222 H01L2224 H01L2224/H01L2224/1 H01L2224/11 H01L2224/114 H01L2224/1143 H01L2224/1146 H01L2224/11462 H01L2224/13 H01L2224/131 H01L2224/1311 H01L2224/13111 H01L2224/1314 H01L2224/13144 H01L2224/13147 H01L2224/1315 H01L2224/13155 H01L2224/1316 H01L2224/13166 H01L2224/1318 H01L2224/13184 H01L2224/16 H01L2224/162 H01L2224/1623 H01L2224/16235 H01L23 H01L23/H01L23/3 H01L23/31 H01L23/312 H01L23/3128 H01L23/4 H01L23/49 H01L23/498 H01L23/4981 H01L23/49811 H01L23/49816 H01L23/5 H01L23/53 H01L23/538 H01L23/5383 H01L23/5384 H01L23/5385 H01L23/5386 H01L24 H01L24/H01L24/1 H01L24/11 H01L24/13 H01L24/16 H01L25 H01L25/H01L25/0 H01L25/06 H01L25/065 H01L25/0655 H01L25/1 H01L25/10 H01L25/105 H01L25/18 H01L25/5 H01L25/50 H01L29 H01L292 H01L2924 H01L2924/H01L2924/1 H01L2924/18 H01L2924/181 H01L2924/1816 H01L2924/18161

IPC - классификация

H H0 H01 H01L H01L2 H01L25 H01L25/H01L25/0 H01L25/06 H01L25/065 H01L25/0657 H01L25/1 H01L25/10 H01L25/105 H01L25/5 H01L25/50

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