Metal to metal bonding for stacked (3D) integrated circuits

30-05-2017 дата публикации

Номер:

US09666563B2

Автор: John A. Fitzsimmons, Mukta G. Farooq, Tien-Jen Cheng

Принадлежит: International Business Machines Corp

Контакты:

Номер заявки:

Дата заявки:

CPC - классификация

H H0 H01 H01L H01L2 H01L22 H01L222 H01L2224 H01L2224/H01L2224/0 H01L2224/03 H01L2224/034 H01L2224/0346 H01L2224/03464 H01L2224/036 H01L2224/0361 H01L2224/03616 H01L2224/038 H01L2224/0382 H01L2224/03825 H01L2224/03829 H01L2224/039 H01L2224/05 H01L2224/050 H01L2224/0500 H01L2224/05005 H01L2224/0501 H01L2224/05017 H01L2224/0502 H01L2224/05025 H01L2224/0507 H01L2224/05073 H01L2224/0508 H01L2224/05082 H01L2224/051 H01L2224/0514 H01L2224/05147 H01L2224/0515 H01L2224/05155 H01L2224/055 H01L2224/0554 H01L2224/05541 H01L2224/0555 H01L2224/05551 H01L2224/05552 H01L2224/05557 H01L2224/0557 H01L2224/05572 H01L2224/056 H01L2224/0564 H01L2224/05644 H01L2224/05647 H01L2224/0565 H01L2224/05655 H01L2224/08 H01L2224/081 H01L2224/0814 H01L2224/08145 H01L2224/2 H01L2224/27 H01L2224/274 H01L2224/2746 H01L2224/27464 H01L2224/278 H01L2224/2783 H01L2224/27831 H01L2224/3 H01L2224/32 H01L2224/321 H01L2224/3214 H01L2224/32145 H01L2224/32146 H01L2224/8 H01L2224/80 H01L2224/802 H01L2224/8020 H01L2224/80203 H01L2224/804 H01L2224/8044 H01L2224/80447 H01L2224/808 H01L2224/8089 H01L2224/80895 H01L2224/83 H01L2224/838 H01L2224/8389 H01L2224/83895 H01L2224/9 H01L2224/94 H01L2225 H01L2225/H01L2225/0 H01L2225/06 H01L2225/065 H01L2225/0651 H01L2225/06513 H01L2225/0654 H01L2225/06541 H01L23 H01L23/H01L23/4 H01L23/48 H01L23/481 H01L23/488 H01L23/5 H01L23/53 H01L23/538 H01L23/5386 H01L24 H01L24/H01L24/0 H01L24/03 H01L24/05 H01L24/08 H01L24/3 H01L24/32 H01L24/8 H01L24/80 H01L24/83 H01L24/9 H01L24/94 H01L25 H01L25/H01L25/0 H01L25/06 H01L25/065 H01L25/0657 H01L25/5 H01L25/50 H01L29 H01L292 H01L2924 H01L2924/H01L2924/0 H01L2924/00 H01L2924/000 H01L2924/0001 H01L2924/00012 H01L2924/00014 H01L2924/01 H01L2924/010 H01L2924/0104 H01L2924/01046 H01L2924/01047 H01L2924/0105 H01L2924/1 H01L2924/10 H01L2924/101 H01L2924/1011 H01L2924/3 H01L2924/35 H01L2924/351 H01L2924/3511

IPC - классификация

H H0 H01 H01L H01L2 H01L24 H01L24/H01L24/8 H01L24/83 H01L25 H01L25/H01L25/1 H01L25/10 H01L25/105 H01L25/5 H01L25/50

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