Warpage control for flexible substrates

22-11-2016 дата публикации

Номер:

US09502271B2

Автор: Chen-Hua Yu, Jing-Cheng Lin, Shang-Yun Hou, Shih Ting Lin, Szu Wei Lu

Принадлежит: Taiwan Semiconductor Manufacturing Co TSMC Ltd

Контакты:

Номер заявки:

Дата заявки:

CPC - классификация

H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/5 H01L21/56 H01L21/561 H01L21/563 H01L22 H01L222 H01L2224 H01L2224/H01L2224/0 H01L2224/04 H01L2224/040 H01L2224/0401 H01L2224/05 H01L2224/056 H01L2224/0560 H01L2224/05609 H01L2224/0561 H01L2224/05611 H01L2224/0562 H01L2224/05624 H01L2224/0564 H01L2224/05644 H01L2224/05647 H01L2224/057 H01L2224/0579 H01L2224/05794 H01L2224/058 H01L2224/1 H01L2224/13 H01L2224/131 H01L2224/1310 H01L2224/13109 H01L2224/1311 H01L2224/13111 H01L2224/1314 H01L2224/13144 H01L2224/13147 H01L2224/132 H01L2224/1329 H01L2224/13294 H01L2224/133 H01L2224/16 H01L2224/3 H01L2224/32 H01L2224/322 H01L2224/3222 H01L2224/32225 H01L2224/7 H01L2224/73 H01L2224/732 H01L2224/7320 H01L2224/73204 H01L2224/8 H01L2224/81 H01L2224/810 H01L2224/8100 H01L2224/81007 H01L2224/811 H01L2224/8119 H01L2224/81192 H01L2224/81193 H01L2224/814 H01L2224/8140 H01L2224/81409 H01L2224/8141 H01L2224/81411 H01L2224/8142 H01L2224/81424 H01L2224/8144 H01L2224/81444 H01L2224/81447 H01L2224/818 H01L2224/8181 H01L2224/81815 H01L2224/83 H01L2224/830 H01L2224/8300 H01L2224/83007 H01L2224/831 H01L2224/9 H01L2224/92 H01L2224/921 H01L2224/9212 H01L2224/92125 H01L23 H01L23/H01L23/1 H01L23/14 H01L23/145 H01L23/4 H01L23/49 H01L23/498 H01L23/4983 H01L23/49833 H01L23/4985 H01L23/5 H01L23/53 H01L23/538 H01L23/5387 H01L23/56 H01L23/562 H01L24 H01L24/H01L24/0 H01L24/05 H01L24/1 H01L24/13 H01L24/16 H01L24/3 H01L24/32 H01L24/8 H01L24/81 H01L24/83 H01L24/9 H01L24/92 H01L29 H01L292 H01L2924 H01L2924/H01L2924/0 H01L2924/00 H01L2924/000 H01L2924/0001 H01L2924/00014 H01L2924/01 H01L2924/010 H01L2924/0102 H01L2924/01029 H01L2924/0103 H01L2924/01032 H01L2924/013 H01L2924/0132 H01L2924/01322 H01L2924/014 H01L2924/1 H01L2924/15 H01L2924/151 H01L2924/1515 H01L2924/15151 H01L2924/3 H01L2924/35 H01L2924/351 H01L2924/3511

IPC - классификация

H H0 H01 H01L H01L2 H01L24 H01L24/H01L24/0 H01L24/05 H01L24/8 H01L24/81 H01L24/83

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