Top layers of metal for high performance IC's

03-11-2005 дата публикации

Номер:

US2005245067A1

Автор: LIN MOU-SHIUNG

Принадлежит:

Контакты:

Номер заявки: 05-17-1309

Дата заявки: 17-05-2005

A method of closely interconnecting integrated circuits contained within a semiconductor wafer to electrical circuits surrounding the semiconductor wafer. Electrical interconnects are held to a minimum in length by making efficient use of polyimide or polymer as an inter-metal dielectric thus enabling the integration of very small integrated circuits within a larger circuit environment at a minimum cost in electrical circuit performance.

CPC - классификация

H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/7 H01L21/76 H01L21/768 H01L21/7680 H01L21/76804 H01L21/76807 H01L21/7683 H01L21/76838 H01L22 H01L222 H01L2224 H01L2224/H01L2224/0 H01L2224/02 H01L2224/023 H01L2224/0231 H01L2224/02311 H01L2224/02313 H01L2224/04 H01L2224/040 H01L2224/0401 H01L2224/05 H01L2224/051 H01L2224/0514 H01L2224/05147 H01L2224/0515 H01L2224/05155 H01L2224/0518 H01L2224/05184 H01L2224/056 H01L2224/0562 H01L2224/05624 H01L2224/0564 H01L2224/05647 H01L2224/0567 H01L2224/05671 H01L2224/0568 H01L2224/05684 H01L2224/1 H01L2224/11 H01L2224/114 H01L2224/1148 H01L2224/13 H01L2224/130 H01L2224/1309 H01L2224/13099 H01L2224/16 H01L2224/162 H01L2224/1622 H01L2224/16225 H01L23 H01L23/H01L23/5 H01L23/52 H01L23/522 H01L23/5222 H01L23/5223 H01L23/5225 H01L23/5227 H01L23/5228 H01L23/525 H01L23/528 H01L23/5283 H01L23/5286 H01L23/53 H01L23/532 H01L23/5329 H01L23/53295 H01L23/6 H01L23/60 H01L24 H01L24/H01L24/0 H01L24/02 H01L24/1 H01L24/11 H01L24/12 H01L27 H01L27/H01L27/0 H01L27/06 H01L27/067 H01L27/0676 H01L27/08 H01L28 H01L28/H01L28/1 H01L28/10 H01L28/2 H01L28/20 H01L29 H01L292 H01L2924 H01L2924/H01L2924/0 H01L2924/00 H01L2924/000 H01L2924/0001 H01L2924/01 H01L2924/010 H01L2924/0100 H01L2924/01005 H01L2924/01006 H01L2924/0101 H01L2924/01013 H01L2924/01015 H01L2924/01018 H01L2924/0102 H01L2924/01022 H01L2924/01024 H01L2924/01029 H01L2924/0103 H01L2924/01033 H01L2924/0104 H01L2924/01042 H01L2924/01046 H01L2924/0107 H01L2924/01073 H01L2924/01074 H01L2924/01075 H01L2924/01078 H01L2924/01079 H01L2924/0108 H01L2924/01082 H01L2924/014 H01L2924/04 H01L2924/049 H01L2924/0494 H01L2924/04941 H01L2924/1 H01L2924/12 H01L2924/120 H01L2924/1204 H01L2924/12044 H01L2924/14 H01L2924/15 H01L2924/151 H01L2924/1517 H01L2924/15174 H01L2924/1518 H01L2924/15184 H01L2924/1519 H01L2924/15192 H01L2924/153 H01L2924/1531 H01L2924/15311 H01L2924/19 H01L2924/190 H01L2924/1904 H01L2924/19043 H01L2924/3 H01L2924/30 H01L2924/301 H01L2924/3010 H01L2924/30105 H01L2924/30107 H01L2924/302 H01L2924/3025 H01L2924/35 H01L2924/351 Y Y1 Y10 Y10T Y10T4 Y10T42 Y10T428 Y10T428/Y10T428/1 Y10T428/12 Y10T428/125 Y10T428/1254 Y10T428/12542 Y10T428/129 Y10T428/1299 Y10T428/12993

IPC - классификация

H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/0 H01L21/02 H01L21/4 H01L21/44 H01L21/47 H01L21/476 H01L21/4763 H01L21/5 H01L21/50 H01L21/7 H01L21/76 H01L21/768 H01L23 H01L23/H01L23/5 H01L23/52 H01L23/522 H01L23/525 H01L23/528 H01L23/53 H01L23/532 H01L23/6 H01L23/60 H01L27 H01L27/H01L27/0 H01L27/06 H01L27/08