POWER SEMICONDUCTOR DEVICE, METHOD FOR MANUFACTURING SAME, AND BONDING WIRE

06-09-2013 дата публикации
Номер:
WO2013129253A1
Контакты:
Номер заявки: JP45-05-201324
Дата заявки: 22-02-2013



[0000]

The present invention addresses the issue of providing: a power semiconductor device, which can be used without a problem even if heat stress is generated, and which is capable of reducing heat generated by a wire, and is capable of ensuring reliability of a bonding section even under high-temperature environments, at the time when the current capacity of the power semiconductor device is increased and the power semiconductor device is used under high-temperature environments; a method for manufacturing the power semiconductor device; and a bonding wire. In a power semiconductor device (1), a metal electrode (element electrode (3)) and the other metal electrode (connecting electrode (4)), which are on a power semiconductor element (2), are both wedge-connected by means of a metal wire (5). The metal wire (5) is an Ag wire or an Ag alloy wire having a diameter larger than 50 μm but equal to or smaller than 2 mm, and the element electrode (3) has, on the surface thereof, one or more metal layers or alloy layers, each of which has a thickness of 50 Å or more, said metal layers being composed of a metal selected from among Ni, Cr, Cu, Pd, V, Ti, Pt, Zn, Ag, Au, W, and Al, and said alloy layers being composed of metals selected from among such metals. Consequently, irrespective of the fact that the Ag wire is used, reliability of a bonding section to the electrode can be ensured, heat generated by the metal wire can be reduced when a large current is used, and heat resistance at a high temperature is improved.

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CPC - классификация

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