POWER SEMICONDUCTOR DEVICE, METHOD FOR MANUFACTURING SAME, AND BONDING WIRE

06-09-2013 дата публикации

Номер:

WO2013129253A1

Автор: TATSUMI KOHEI, YAMADA TAKASHI, ODA Daizou

Принадлежит: 学校法人早稲田大学, 日鉄住金マイクロメタル株式会社

Контакты:

Номер заявки: JP45-05-201324

Дата заявки: 22-02-2013

[0000]

The present invention addresses the issue of providing: a power semiconductor device, which can be used without a problem even if heat stress is generated, and which is capable of reducing heat generated by a wire, and is capable of ensuring reliability of a bonding section even under high-temperature environments, at the time when the current capacity of the power semiconductor device is increased and the power semiconductor device is used under high-temperature environments; a method for manufacturing the power semiconductor device; and a bonding wire. In a power semiconductor device (1), a metal electrode (element electrode (3)) and the other metal electrode (connecting electrode (4)), which are on a power semiconductor element (2), are both wedge-connected by means of a metal wire (5). The metal wire (5) is an Ag wire or an Ag alloy wire having a diameter larger than 50 μm but equal to or smaller than 2 mm, and the element electrode (3) has, on the surface thereof, one or more metal layers or alloy layers, each of which has a thickness of 50 Å or more, said metal layers being composed of a metal selected from among Ni, Cr, Cu, Pd, V, Ti, Pt, Zn, Ag, Au, W, and Al, and said alloy layers being composed of metals selected from among such metals. Consequently, irrespective of the fact that the Ag wire is used, reliability of a bonding section to the electrode can be ensured, heat generated by the metal wire can be reduced when a large current is used, and heat resistance at a high temperature is improved.

[1]

CPC - классификация

H H0 H01 H01L H01L2 H01L22 H01L222 H01L2224 H01L2224/H01L2224/0 H01L2224/03 H01L2224/034 H01L2224/0344 H01L2224/03444 H01L2224/0345 H01L2224/0346 H01L2224/04 H01L2224/040 H01L2224/0404 H01L2224/04042 H01L2224/05 H01L2224/050 H01L2224/0500 H01L2224/05007 H01L2224/0507 H01L2224/05073 H01L2224/0508 H01L2224/05082 H01L2224/05083 H01L2224/05084 H01L2224/051 H01L2224/0511 H01L2224/05118 H01L2224/0512 H01L2224/05124 H01L2224/0513 H01L2224/05139 H01L2224/0514 H01L2224/05144 H01L2224/05147 H01L2224/0515 H01L2224/05155 H01L2224/0516 H01L2224/05164 H01L2224/05166 H01L2224/05169 H01L2224/0517 H01L2224/05171 H01L2224/05172 H01L2224/0518 H01L2224/05184 H01L2224/056 H01L2224/0561 H01L2224/05618 H01L2224/0562 H01L2224/05624 H01L2224/0563 H01L2224/05639 H01L2224/0564 H01L2224/05644 H01L2224/05647 H01L2224/0565 H01L2224/05655 H01L2224/0566 H01L2224/05664 H01L2224/05666 H01L2224/05669 H01L2224/0567 H01L2224/05671 H01L2224/05672 H01L2224/0568 H01L2224/05684 H01L2224/3 H01L2224/32 H01L2224/322 H01L2224/3224 H01L2224/32245 H01L2224/4 H01L2224/43 H01L2224/431 H01L2224/4312 H01L2224/43125 H01L2224/432 H01L2224/4321 H01L2224/438 H01L2224/4384 H01L2224/43848 H01L2224/439 H01L2224/4398 H01L2224/43986 H01L2224/45 H01L2224/450 H01L2224/4500 H01L2224/45005 H01L2224/4501 H01L2224/45015 H01L2224/451 H01L2224/4512 H01L2224/45124 H01L2224/4513 H01L2224/45139 H01L2224/4514 H01L2224/45144 H01L2224/45147 H01L2224/455 H01L2224/4556 H01L2224/45565 H01L2224/4557 H01L2224/45572 H01L2224/456 H01L2224/4561 H01L2224/45611 H01L2224/45618 H01L2224/4562 H01L2224/45624 H01L2224/4563 H01L2224/45639 H01L2224/4564 H01L2224/45644 H01L2224/45647 H01L2224/4565 H01L2224/45655 H01L2224/4566 H01L2224/45664 H01L2224/45666 H01L2224/45669 H01L2224/4567 H01L2224/45671 H01L2224/45672 H01L2224/4568 H01L2224/45684 H01L2224/45686 H01L2224/48 H01L2224/480 H01L2224/4809 H01L2224/48091 H01L2224/481 H01L2224/4813 H01L2224/48137 H01L2224/482 H01L2224/4822 H01L2224/48227 H01L2224/4824 H01L2224/48247 H01L2224/484 H01L2224/4846 H01L2224/48463 H01L2224/4847 H01L2224/48472 H01L2224/488 H01L2224/4881 H01L2224/48818 H01L2224/4882 H01L2224/48824 H01L2224/4883 H01L2224/48839 H01L2224/4884 H01L2224/48844 H01L2224/48847 H01L2224/4885 H01L2224/48855 H01L2224/4886 H01L2224/48864 H01L2224/48866 H01L2224/48869 H01L2224/4887 H01L2224/48871 H01L2224/48872 H01L2224/4888 H01L2224/48884 H01L2224/7 H01L2224/73 H01L2224/732 H01L2224/7326 H01L2224/73265 H01L2224/78 H01L2224/783 H01L2224/7831 H01L2224/78313 H01L2224/8 H01L2224/85 H01L2224/852 H01L2224/8520 H01L2224/85205 H01L2224/85207 H01L2224/854 H01L2224/8543 H01L2224/85439 H01L2224/859 H01L2224/8592 H01L24 H01L24/H01L24/0 H01L24/03 H01L24/05 H01L24/4 H01L24/43 H01L24/45 H01L24/48 H01L24/8 H01L24/85 H01L29 H01L292 H01L2924 H01L2924/H01L2924/0 H01L2924/00 H01L2924/000 H01L2924/0001 H01L2924/00011 H01L2924/00014 H01L2924/01 H01L2924/010 H01L2924/0104 H01L2924/01047 H01L2924/1 H01L2924/10 H01L2924/102 H01L2924/1025 H01L2924/10253 H01L2924/1027 H01L2924/10272 H01L2924/13 H01L2924/130 H01L2924/1305 H01L2924/13055 H01L2924/15 H01L2924/157 H01L2924/1574 H01L2924/15747 H01L2924/2 H01L2924/20 H01L2924/201 H01L2924/2010 H01L2924/20103 H01L2924/3 H01L2924/35 H01L2924/351

IPC - классификация

H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/6 H01L21/60 H01L21/607 H01L23 H01L23/H01L23/4 H01L23/48 H01L23/482 H01L23/4824 H01L24 H01L24/H01L24/4 H01L24/48 H01L24/7 H01L24/78

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