Semiconductor device and method for forming openings and trenches in insulating layer by first LDA and second LDA for RDL formation

28-03-2017 дата публикации

Номер:

US09607958B2

Автор: KANG Chen, Pandi C. Marimuthu, Yaojian Lin

Принадлежит: Stats Chippac Pte Ltd

Контакты:

Номер заявки:

Дата заявки:

CPC - классификация

H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/5 H01L21/56 H01L21/561 H01L21/565 H01L21/568 H01L22 H01L222 H01L2224 H01L2224/H01L2224/0 H01L2224/02 H01L2224/021 H01L2224/0212 H01L2224/02125 H01L2224/023 H01L2224/0235 H01L2224/02351 H01L2224/0236 H01L2224/0237 H01L2224/02372 H01L2224/02379 H01L2224/03 H01L2224/034 H01L2224/0345 H01L2224/0346 H01L2224/03462 H01L2224/03464 H01L2224/0348 H01L2224/036 H01L2224/0361 H01L2224/039 H01L2224/0391 H01L2224/04 H01L2224/040 H01L2224/0401 H01L2224/041 H01L2224/0410 H01L2224/04105 H01L2224/05 H01L2224/050 H01L2224/0509 H01L2224/05099 H01L2224/055 H01L2224/0554 H01L2224/05548 H01L2224/0555 H01L2224/05552 H01L2224/05557 H01L2224/0556 H01L2224/05567 H01L2224/0559 H01L2224/05599 H01L2224/06 H01L2224/061 H01L2224/0618 H01L2224/06181 H01L2224/1 H01L2224/11 H01L2224/113 H01L2224/1133 H01L2224/11334 H01L2224/114 H01L2224/1146 H01L2224/118 H01L2224/1184 H01L2224/11849 H01L2224/12 H01L2224/121 H01L2224/1210 H01L2224/12105 H01L2224/13 H01L2224/130 H01L2224/1300 H01L2224/13008 H01L2224/1302 H01L2224/13022 H01L2224/13023 H01L2224/13024 H01L2224/1309 H01L2224/13099 H01L2224/131 H01L2224/1311 H01L2224/13111 H01L2224/13113 H01L2224/1312 H01L2224/13124 H01L2224/1313 H01L2224/13139 H01L2224/1314 H01L2224/13144 H01L2224/13147 H01L2224/1315 H01L2224/13155 H01L2224/9 H01L2224/94 H01L23 H01L23/H01L23/2 H01L23/29 H01L23/291 H01L23/3 H01L23/31 H01L23/312 H01L23/3121 H01L23/313 H01L23/3135 H01L23/4 H01L23/49 H01L23/498 H01L23/4981 H01L23/49816 H01L23/5 H01L23/53 H01L23/538 H01L23/5389 H01L24 H01L24/H01L24/0 H01L24/03 H01L24/05 H01L24/1 H01L24/11 H01L24/13 H01L24/14 H01L24/19 H01L24/2 H01L24/20 H01L29 H01L292 H01L2924 H01L2924/H01L2924/0 H01L2924/00 H01L2924/000 H01L2924/0001 H01L2924/00012 H01L2924/00013 H01L2924/00014 H01L2924/01 H01L2924/013 H01L2924/0132 H01L2924/01322 H01L2924/1 H01L2924/12 H01L2924/120 H01L2924/1204 H01L2924/12041 H01L2924/12042 H01L2924/13 H01L2924/130 H01L2924/1306 H01L2924/1309 H01L2924/13091 H01L2924/18 H01L2924/181 H01L2924/1815 H01L2924/1816 H01L2924/18161 H01L2924/2 H01L2924/20 H01L2924/201 H01L2924/2010 H01L2924/20101

IPC - классификация

H H0 H01 H01L H01L2 H01L23 H01L23/H01L23/5 H01L23/53 H01L23/538 H01L23/5389 H01L24 H01L24/H01L24/0 H01L24/05 H01L24/8 H01L24/81

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