Electronic devices having metallurgies containing copper-semiconductor compounds

24-11-1998 дата публикации

Номер:

CA2089791C

Автор: Curtis E. Farrell, Donald J. Mikalsen, Eugene J. O'Sullivan, George F. Walker, Jeffrey R. Marino, Michael J. Brady, Paul A. Moskowitz, Sampath Purushothaman, Sheldon C. Rieley, Sung K. Kang, Terrence R. O'Toole

Принадлежит: International Business Machines Corp

Контакты:

Номер заявки:

Дата заявки:

CPC - классификация

C C2 C23 C23C C23C1 C23C18 C23C18/C23C18/5 C23C18/50 C25 C25D C25D3 C25D3/C25D3/5 C25D3/54 H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/2 H01L21/28 H01L21/288 H01L21/2885 H01L21/6 H01L21/68 H01L21/683 H01L21/6835 H01L21/7 H01L21/76 H01L21/768 H01L21/7683 H01L21/76838 H01L22 H01L222 H01L2224 H01L2224/H01L2224/0 H01L2224/02 H01L2224/021 H01L2224/0212 H01L2224/02126 H01L2224/03 H01L2224/034 H01L2224/0347 H01L2224/04 H01L2224/040 H01L2224/0401 H01L2224/0404 H01L2224/04042 H01L2224/0407 H01L2224/04073 H01L2224/05 H01L2224/050 H01L2224/0502 H01L2224/05022 H01L2224/05027 H01L2224/0508 H01L2224/051 H01L2224/0514 H01L2224/05147 H01L2224/0516 H01L2224/05166 H01L2224/0517 H01L2224/05171 H01L2224/055 H01L2224/0557 H01L2224/05572 H01L2224/056 H01L2224/0560 H01L2224/05609 H01L2224/0561 H01L2224/05611 H01L2224/05616 H01L2224/0562 H01L2224/05624 H01L2224/0563 H01L2224/05639 H01L2224/0564 H01L2224/05644 H01L2224/05647 H01L2224/1 H01L2224/10 H01L2224/101 H01L2224/1012 H01L2224/10126 H01L2224/11 H01L2224/114 H01L2224/1145 H01L2224/13 H01L2224/130 H01L2224/1302 H01L2224/13022 H01L2224/131 H01L2224/1310 H01L2224/13101 H01L2224/13105 H01L2224/13109 H01L2224/1311 H01L2224/13111 H01L2224/13113 H01L2224/13116 H01L2224/13118 H01L2224/1312 H01L2224/1313 H01L2224/13139 H01L2224/1314 H01L2224/13144 H01L2224/13147 H01L2224/2 H01L2224/29 H01L2224/291 H01L2224/2919 H01L2224/3 H01L2224/30 H01L2224/301 H01L2224/3015 H01L2224/32 H01L2224/322 H01L2224/3224 H01L2224/32245 H01L2224/4 H01L2224/45 H01L2224/451 H01L2224/4510 H01L2224/45101 H01L2224/4512 H01L2224/45124 H01L2224/4513 H01L2224/45139 H01L2224/4514 H01L2224/45144 H01L2224/45147 H01L2224/4515 H01L2224/45155 H01L2224/48 H01L2224/480 H01L2224/4809 H01L2224/48091 H01L2224/482 H01L2224/4824 H01L2224/48247 H01L2224/4826 H01L2224/484 H01L2224/4846 H01L2224/48465 H01L2224/4847 H01L2224/486 H01L2224/4860 H01L2224/48609 H01L2224/4861 H01L2224/48611 H01L2224/48616 H01L2224/4862 H01L2224/48624 H01L2224/4863 H01L2224/48639 H01L2224/4864 H01L2224/48644 H01L2224/48647 H01L2224/487 H01L2224/4870 H01L2224/48709 H01L2224/4871 H01L2224/48711 H01L2224/48716 H01L2224/4872 H01L2224/48724 H01L2224/4873 H01L2224/48739 H01L2224/4874 H01L2224/48744 H01L2224/48747 H01L2224/488 H01L2224/4880 H01L2224/48809 H01L2224/4881 H01L2224/48811 H01L2224/48816 H01L2224/4883 H01L2224/48839 H01L2224/4884 H01L2224/48844 H01L2224/48847 H01L2224/7 H01L2224/73 H01L2224/732 H01L2224/7321 H01L2224/73215 H01L2224/8 H01L2224/85 H01L2224/850 H01L2224/8500 H01L2224/85001 H01L2224/852 H01L2224/8520 H01L2224/85201 H01L2224/85203 H01L2224/85205 H01L2224/8521 H01L2224/85214 H01L2224/9 H01L2224/92 H01L2224/921 H01L2224/9214 H01L2224/92147 H01L23 H01L23/H01L23/4 H01L23/49 H01L23/495 H01L23/4951 H01L23/498 H01L23/4985 H01L23/4987 H01L23/49872 H01L23/5 H01L23/53 H01L23/532 H01L23/5327 H01L23/53271 H01L24 H01L24/H01L24/0 H01L24/03 H01L24/05 H01L24/1 H01L24/13 H01L24/4 H01L24/45 H01L24/48 H01L24/8 H01L24/85 H01L24/9 H01L24/97 H01L29 H01L292 H01L2924 H01L2924/H01L2924/0 H01L2924/00 H01L2924/000 H01L2924/0001 H01L2924/00014 H01L2924/0002 H01L2924/01 H01L2924/010 H01L2924/0100 H01L2924/01005 H01L2924/01006 H01L2924/0101 H01L2924/01011 H01L2924/01013 H01L2924/01014 H01L2924/01015 H01L2924/01019 H01L2924/0102 H01L2924/01022 H01L2924/01023 H01L2924/01024 H01L2924/01027 H01L2924/01028 H01L2924/01029 H01L2924/0103 H01L2924/01031 H01L2924/01032 H01L2924/01033 H01L2924/0104 H01L2924/01042 H01L2924/01047 H01L2924/0105 H01L2924/01051 H01L2924/01058 H01L2924/0106 H01L2924/0107 H01L2924/01074 H01L2924/01078 H01L2924/01079 H01L2924/0108 H01L2924/01082 H01L2924/01083 H01L2924/013 H01L2924/0132 H01L2924/01327 H01L2924/014 H01L2924/05 H01L2924/050 H01L2924/0504 H01L2924/05042 H01L2924/09 H01L2924/097 H01L2924/0970 H01L2924/09701 H01L2924/1 H01L2924/10 H01L2924/102 H01L2924/1025 H01L2924/10253 H01L2924/103 H01L2924/1032 H01L2924/10329 H01L2924/12 H01L2924/120 H01L2924/1203 H01L2924/12032 H01L2924/12033 H01L2924/1204 H01L2924/12042 H01L2924/14 H01L2924/15 H01L2924/157 H01L2924/1574 H01L2924/15747 H01L2924/1578 H01L2924/15787 H01L2924/18 H01L2924/181 H01L2924/3 H01L2924/30 H01L2924/301 H01L2924/3010 H01L2924/30105 H01L2924/3011 Y Y1 Y10 Y10S Y10S4 Y10S42 Y10S428 Y10S428/Y10S428/9 Y10S428/90 Y10S428/901 Y10T Y10T4 Y10T42 Y10T428 Y10T428/Y10T428/2 Y10T428/24 Y10T428/249 Y10T428/2491 Y10T428/24917

IPC - классификация

C C2 C23 C23C C23C1 C23C18 C23C18/C23C18/5 C23C18/50 C25 C25D C25D3 C25D3/C25D3/5 C25D3/54 H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/2 H01L21/28 H01L21/288 H01L21/2885