Method of making a conductive pillar bump with non-metal sidewall protection structure

15-03-2016 дата публикации

Номер:

US9287171B2

Автор: Cheng-Chung Lin, Chien Ling Hwang, Chung-Shi Liu, Yi-Wen WU

Принадлежит: Taiwan Semiconductor Manufacturing Co TSMC Ltd

Контакты:

Номер заявки:

Дата заявки:

CPC - классификация

H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/7 H01L21/76 H01L21/768 H01L21/7685 H01L21/76852 H01L21/7688 H01L21/76885 H01L22 H01L222 H01L2224 H01L2224/H01L2224/0 H01L2224/03 H01L2224/034 H01L2224/0345 H01L2224/04 H01L2224/040 H01L2224/0401 H01L2224/05 H01L2224/050 H01L2224/0502 H01L2224/05023 H01L2224/051 H01L2224/0516 H01L2224/05166 H01L2224/0518 H01L2224/05181 H01L2224/05187 H01L2224/055 H01L2224/0554 H01L2224/05541 H01L2224/0555 H01L2224/05552 H01L2224/0556 H01L2224/05568 H01L2224/0558 H01L2224/05582 H01L2224/056 H01L2224/0561 H01L2224/05611 H01L2224/0563 H01L2224/05639 H01L2224/0564 H01L2224/05644 H01L2224/05647 H01L2224/0565 H01L2224/05655 H01L2224/0566 H01L2224/05666 H01L2224/0567 H01L2224/05671 H01L2224/0568 H01L2224/05681 H01L2224/05687 H01L2224/1 H01L2224/10 H01L2224/101 H01L2224/1014 H01L2224/10145 H01L2224/11 H01L2224/110 H01L2224/1100 H01L2224/11002 H01L2224/111 H01L2224/1112 H01L2224/113 H01L2224/1132 H01L2224/114 H01L2224/1145 H01L2224/11452 H01L2224/1146 H01L2224/11462 H01L2224/11464 H01L2224/1147 H01L2224/118 H01L2224/1182 H01L2224/11827 H01L2224/1183 H01L2224/11831 H01L2224/1184 H01L2224/11849 H01L2224/119 H01L2224/1191 H01L2224/11912 H01L2224/13 H01L2224/130 H01L2224/1300 H01L2224/13005 H01L2224/13007 H01L2224/1302 H01L2224/13023 H01L2224/1308 H01L2224/13083 H01L2224/131 H01L2224/1310 H01L2224/13109 H01L2224/1311 H01L2224/13111 H01L2224/13113 H01L2224/13116 H01L2224/13118 H01L2224/1312 H01L2224/13123 H01L2224/13124 H01L2224/1313 H01L2224/13139 H01L2224/1314 H01L2224/13144 H01L2224/13147 H01L2224/1315 H01L2224/13155 H01L2224/1316 H01L2224/13164 H01L2224/13166 H01L2224/13169 H01L2224/1317 H01L2224/13171 H01L2224/1318 H01L2224/13181 H01L2224/135 H01L2224/1355 H01L2224/13551 H01L2224/1356 H01L2224/13561 H01L2224/13565 H01L2224/1357 H01L2224/1358 H01L2224/13582 H01L2224/136 H01L2224/1364 H01L2224/13644 H01L2224/13647 H01L2224/1365 H01L2224/13655 H01L2224/1366 H01L2224/13664 H01L2224/1368 H01L2224/13686 H01L2224/13687 H01L2224/13688 H01L2224/1369 H01L2224/8 H01L2224/81 H01L2224/811 H01L2224/8119 H01L2224/81192 H01L2224/81193 H01L2224/814 H01L2224/818 H01L2224/8181 H01L2224/81815 H01L2224/9 H01L2224/94 H01L23 H01L23/H01L23/4 H01L23/49 H01L23/498 H01L23/4981 H01L23/49811 H01L24 H01L24/H01L24/0 H01L24/03 H01L24/05 H01L24/1 H01L24/11 H01L24/13 H01L24/16 H01L29 H01L292 H01L2924 H01L2924/H01L2924/0 H01L2924/00 H01L2924/000 H01L2924/0001 H01L2924/00014 H01L2924/0002 H01L2924/01 H01L2924/010 H01L2924/0100 H01L2924/01005 H01L2924/01006 H01L2924/01007 H01L2924/0101 H01L2924/01012 H01L2924/01013 H01L2924/01014 H01L2924/01015 H01L2924/01019 H01L2924/0102 H01L2924/01022 H01L2924/01023 H01L2924/01024 H01L2924/01025 H01L2924/01029 H01L2924/0103 H01L2924/01032 H01L2924/01033 H01L2924/01038 H01L2924/0104 H01L2924/01046 H01L2924/01047 H01L2924/01049 H01L2924/0105 H01L2924/0107 H01L2924/01073 H01L2924/01074 H01L2924/01075 H01L2924/01078 H01L2924/01079 H01L2924/0108 H01L2924/01082 H01L2924/013 H01L2924/0132 H01L2924/01322 H01L2924/014 H01L2924/04 H01L2924/049 H01L2924/0494 H01L2924/04941 H01L2924/0495 H01L2924/04953 H01L2924/05 H01L2924/050 H01L2924/0504 H01L2924/05042 H01L2924/054 H01L2924/0544 H01L2924/05442 H01L2924/06 H01L2924/066 H01L2924/0665 H01L2924/07 H01L2924/070 H01L2924/0702 H01L2924/07025 H01L2924/1 H01L2924/13 H01L2924/130 H01L2924/1305 H01L2924/1306 H01L2924/1309 H01L2924/13091 H01L2924/14 H01L2924/19 H01L2924/190 H01L2924/1904 H01L2924/19041 H01L2924/3 H01L2924/38 H01L2924/384 H01L2924/3841

IPC - классификация

H H0 H01 H01L H01L2 H01L24 H01L24/H01L24/0 H01L24/05 H01L24/1 H01L24/11 H01L24/8 H01L24/81

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